Penning Ion Source Based on Thermionic Discharge

Abstract

The invention discloses a Penning ion source based on thermal electron discharge, which includes: a hot wire electrode assembly, a discharge chamber, an insulating sleeve, an anode cylinder assembly, a cathode net, an accelerating pole, and a magnetic pole. After the component is conductive and heated, a hot wire discharge occurs, and a Penning discharge is formed between the anode cylinder and the cathode grid. The electrons realize reciprocating motion under the action of the electric field and magnetic field in the discharge chamber and the anode cylinder, and the movement distance of the electrons is greatly reduced. The number of effective collisions increases exponentially, and is accelerated by the accelerating pole to output a large beam of particle flow into the vacuum chamber. There are three water-cooled chambers in the hot wire electrode assembly and the discharge chamber, which can efficiently cool the hot wire discharge. The heat generated in the process; the present invention has the following advantages and effects: the present invention realizes uniform and stable discharge by combining Penning discharge with hot wire discharge, and can have better cooling effect, improving the long-term high-efficiency and stability of the ion source sex.

Description

technical field [0001] The invention relates to a Penning ion source, in particular to a Penning ion source based on thermal electron discharge. Background technique [0002] The ion source is the most widely used ion-assisted deposition at this stage, and a device that discharges ionized gas through plasma during the vapor deposition process of cleaning the product to be plated. The ion source can effectively improve the density and adhesion of the film layer, as well as the optical and mechanical properties of the film layer. The commonly used ion sources at this stage mainly include Penning ion source, Hall ion source, and anode layer ion source. [0003] The Penning ion source is an ion source designed on the basis of Penning discharge. By applying a magnetic field in the axial direction of the annular anode, the electrons move back and forth between the two cathodes to increase the ionization rate of gas particles. The Penning ion source The principle causes the struc...

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Problems solved by technology

However, the gap between the anode and the cathode of the ion source on the anode layer is small, and the coating device is easily polluted, which affects the insulation of the ion source. At the same time, there is ablation corrosion on the cathode, which is easy to pollute the coating.

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