Zirconium nitride powder and method for producing same

A manufacturing method and technology of zirconium nitride, applied in chemical instruments and methods, nitrogen compounds, inorganic chemistry, etc., can solve problems such as unsuitability for insulation, and achieve the effects of inhibiting sedimentation, high shading performance, and improving nitriding efficiency

Active Publication Date: 2019-06-21
MITSUBISHI MATERIALS ELECTRONICS CHEM CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Carbon black, conventionally used as a black pigment, is not suitable for applications requiring insulation due to its electrical conductivity.

Method used

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  • Zirconium nitride powder and method for producing same
  • Zirconium nitride powder and method for producing same
  • Zirconium nitride powder and method for producing same

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0066] 7.3 g of metallic magnesium powder with an average primary particle size of 150 μm and 3.0 g of magnesium nitride powder with an average primary particle size of 200 nm were added to 7.4 g of monoclinic zirconia powder, and a graphite boat was placed in a quartz glass tube. The reaction device was used for uniform mixing, and the average primary particle diameter of the monoclinic zirconia powder calculated from the specific surface area measured by the BET method was 50 nm. At this time, the added amount of metal magnesium is 5.0 times mole of zirconium dioxide, and the added amount of magnesium nitride is 0.5 times mole of zirconium dioxide. This mixture was fired at a temperature of 700° C. for 60 minutes in a nitrogen atmosphere to obtain a fired product. Disperse the calcined product in 1 liter of water, slowly add 10% hydrochloric acid to bring the pH to 1 or higher, and wash while keeping the temperature below 100°C, then adjust the pH to 7 to 8 with 25% ammonia ...

Embodiment 2

[0068] The metallic magnesium powder identical with embodiment 1 is changed into 4.4g (3.0 times mole of zirconium dioxide), makes reaction gas be the mixed gas of nitrogen and hydrogen, in the ratio of their volume % (N 2 :H 2 ) was 90%: 10% of the mixed gas atmosphere, except that the firing time was 30 minutes, and zirconium nitride powder was produced in the same manner as in Example 1.

Embodiment 3

[0070] 7.4 g of zirconium dioxide powder identical to Example 1 was dispersed in ethanol, and the mixed liquid was added and mixed to a silicate sol-gel liquid (0.1522 g of silicon dioxide component) mainly composed of ethyl silicate, A slurry having a solid content concentration of 30% by mass was prepared. The slurry was dried with a box dryer at a temperature of 70° C. for 120 minutes in an air atmosphere to obtain a zirconia powder coated with silica and having an average primary particle diameter of 50 nm. In this powder, zirconia contains 3.0% by mass of silicon dioxide (SiO 2 ). 8.8 g of metallic magnesium powder with an average primary particle diameter of 300 μm and 2.1 g of magnesium nitride powder with an average primary particle diameter of 500 nm were added to 7.5 g of this zirconia powder, and uniformly mixed in the same manner as in Example 1. At this time, the amount of metal magnesium added was 6.0 times the mole of zirconia, and the amount of magnesium nitr...

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Abstract

A zirconium nitride powder which has a specific surface area of 20 to 90 m2 / g as measured by a BET method, has a peak corresponding to zirconium nitride but does not have a peak corresponding to zirconium dioxide, a peak for lower zirconium oxide or a peak corresponding to lower zirconium oxynitride in an X-ray diffraction profile, and the light transmittance X at 370 nm is at least 18%, the lighttransmittance Y at 550 nm is 12% or less and the ratio (X / Y) of the light transmittance X at 370 nm to the light transmittance Y at 550 nm is 2.5 or more in the transmission spectra of a dispersion that contains the powder at a concentration of 50 ppm.

Description

technical field [0001] The present invention relates to zirconium nitride powder suitable for use as an insulating black pigment and a method for producing the same. More specifically, it relates to a zirconium nitride powder having high light-shielding performance while forming a high-resolution pattern film when forming a black pattern film as a black pigment, and a method for producing the same. It should be noted that this international application claims the priority of Japanese Patent Application No. 191425 (Japanese Patent Application No. 2016-191425) filed on September 29, 2016, and this international application refers to the entire content of Japanese Patent Application No. 2016-191425. Background technique [0002] This black pigment is dispersed in a photosensitive resin to prepare a black photosensitive composition, and the composition is coated on a substrate to form a photoresist film, which is formed by exposing the photoresist film by photolithography. Patt...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B21/076C09C1/00
CPCC01B21/076C09C1/00C01P2006/12C01P2006/60C01P2002/70G03F7/0047C01B21/0615
Inventor 影山谦介小西隆史
Owner MITSUBISHI MATERIALS ELECTRONICS CHEM CO LTD
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