High-purity carbon fiber reinforced silicon carbide composite material and preparation method thereof

Abstract

The invention provides a high-purity carbon fiber reinforced silicon carbide composite material and a preparation method thereof and belongs to high-temperature high-purity composite materials and advanced manufacturing technologies thereof. The composite material can be applied to the fields of semiconductor, solar energy, optoelectronics, machinery, metallurgy, chemical industry, materials and the like. The preparation method comprises the steps that carbon fiber felt and a carbon fiber cloth are subjected to purification treatment first, pyrolysis of carbon and SiC interface phase deposition are alternately carried out on the surfaces of the carbon fiber felt and carbon fiber cloth, and then prepared high-purity ceramic slurry is sprayed onto the surface of the carbon fiber felt or carbon fiber cloth containing a composite coating by means of a spraying method; stacking, needling, drying and solidifying are carried out to obtain a composite material blank, and the blank is subjectedto high-temperature carbonization treatment, purification treatment and densification treatment to obtain the high-purity carbon fiber reinforced silicon carbide composite material. The preparation method shortens the preparation cycle and reduces the production cost; the composite material prepared by means of the preparation method has the impurity content lower than 10 ppm, the density higherthan 2.20 g / cm<3> and the bending strength higher than 150 MPa.

Description

technical field [0001] The invention belongs to the technical field of high-temperature high-purity composite materials and their advanced manufacturing, and in particular relates to a high-purity carbon fiber reinforced silicon carbide composite material and a preparation method thereof. Background technique [0002] High-purity materials such as single crystal Si, polycrystalline Si, single crystal SiC, GaN, and diamond are the main raw materials for semiconductors, LEDs, and solar energy, and their purity is a key indicator, usually reaching optical or electronic grades. During the smelting and manufacturing process of these high-purity materials, high-temperature-resistant high-purity material containers (crucibles, cover plates, etc.), thermal structural parts (high-temperature support parts, fixing parts, etc.) Plates, heat shields, insulation materials, etc.), in order to ensure the high purity of the prepared materials; for the manufacture of MOCVD epitaxial chips an...

AI Technical Summary

Problems solved by technology

However, in this method, SiC powder has a large amount of dust when it is introduced, and it is easy to leak from the fiber body, and the amount of powder introduced is limited; the number of times of PIP impregnation is large, especially the subsequent densification speed is very slow, and it does not fundamentally solve the problem of C f / SiC ceramic matrix composite material has long preparation period and high preparation cost