Monolithic integrated optical accelerometer based on phase detection

Abstract

The invention discloses a monolithic integrated optical accelerometer based on phase detection. The monolithic integrated optical accelerometer comprises a wide-spectrum light source, a spot size converter, a photoelectric detector, a one-way isolator, 2:1 and 1:2 type Y waveguides, a spring vibrator structure, upper, middle and lower electrodes, a waveguide reflector, a lithium niobate single crystal film layer, a silicon dioxide buffer layer, a silicon substrate, a refrigerating piece, a magnetic force feedback module and a packaged shell; the spring vibrator structure is located between thetwo branch ends of the 1:2 type Y waveguide; the upper electrode and the lower electrode are located on the outer sides of the two branches of the 1:2 type Y waveguide; the middle electrode is located on the upper surface of a mass block of the spring vibrator structure; light is coupled into the 2:1 type Y waveguide through the spot size converter and then enters the 1:2 type Y waveguide throughthe one-way isolator to realize light splitting; and two beams of the light are reflected by the waveguide reflector, are coupled into the branches of the 2:1 type Y waveguide and then are directly coupled into the photoelectric detector. The monolithic integrated optical accelerometer disclosed by the invention is high in detection precision, small in size, simple in preparation process and highin reliability and environmental adaptability.

Description

technical field [0001] The invention belongs to the technical field of integrated optics and inertial sensing, in particular to a single-chip integrated optical accelerometer based on phase detection. Background technique [0002] In recent years, MEMS accelerometers have been widely used in automotive, aerospace and consumer electronics. Among them, capacitance-based accelerometers are simple and mature to manufacture, making them one of the most widely used accelerometers. However, there are some disadvantages based on capacitive sensing mechanism, such as curling effect, parasitic capacitance and small capacitance change caused by acceleration, etc. The accuracy of the accelerometer using the capacitive type is limited, and it is not suitable for the environment of strong electromagnetic interference. Compared with the MEMS acceleration sensor, the optical accelerometer with optical sensing has higher precision, and has stronger anti-electromagnetic interference ability...

AI Technical Summary

Problems solved by technology

The structure of the light intensity sensitive accelerometer is generally relatively simple, and the detection optical path is also easy to realize, but the accuracy is affected by the power stability of the light source in the accelerometer, and the accuracy is low

Wavelength-sensitive accelerometers can eliminate interference caused by various light intensity fluctuations, and have high reliability and stability, including grating type, resonant cavity type and optical tunneling type, etc., but the detection of light wavelength changes requires the use of high-precision spectrometers detection, not suitable for miniaturization and commercial use of accelerometers

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