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A production method for producing electronic-grade sulfuric acid from non-ferrous smelting flue gas

A technology for smelting flue gas and production methods, applied in chemical instruments and methods, sulfur compounds, inorganic chemistry, etc., can solve the problem that sulfuric acid cannot meet electronic grade standards, and achieve the goal of reducing the use of energy and raw materials, and reducing production costs Effect

Active Publication Date: 2021-07-23
岷山环能高科股份公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] In view of this, the present invention provides a production method capable of directly producing high-purity electronic-grade sulfuric acid by using nonferrous smelting flue gas as a raw material, which solves the problem that sulfuric acid produced by using nonferrous smelting flue gas in the prior art cannot reach Questions about Electronic Grade Standards

Method used

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  • A production method for producing electronic-grade sulfuric acid from non-ferrous smelting flue gas

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0033] A production method for producing electronic-grade sulfuric acid by using nonferrous smelting flue gas, comprising the following steps:

[0034] (1) Preparation of fuming sulfuric acid: the SO in the non-ferrous smelting acid system 3 7% SO 3 The flue gas raw material is filtered through a high-temperature filter, and the temperature in the high-temperature filter is set to 180°C. After the filtration is completed, use 105% oleum as the washing acid for SO 3 The flue gas is washed, and then demisted and filtered. Use the fuming sulfuric acid obtained after the mixed treatment in this step to demist and filter the SO in the flue gas 3 absorption, and oleum and SO 3 The flue gas is in reverse contact, and then the oleum after the absorption treatment is mixed with the oleum evaporated once in step (2) to obtain oleum with a concentration of 25%.

[0035] (2) Evaporation treatment: the oleum in the step (1) is evaporated once, and part of the SO is evaporated. 3 The ...

Embodiment 2

[0041] A production method for producing electronic-grade sulfuric acid by using nonferrous smelting flue gas, comprising the following steps:

[0042] (1) Preparation of fuming sulfuric acid: the SO in the non-ferrous smelting acid system 3 7% SO 3 Flue gas raw material through SO 3 The fan transmission enters the high-temperature filter for filtration, and the temperature in the high-temperature filter is set to 200°C.

[0043] After the filtration is completed, use 105% oleum as the washing acid and use the pump to circulate and transport the SO 3 The flue gas is washed, and the washing acid is cooled by the washing acid cooler, and then demisted and filtered to filter out impurities and condensed acid. The flue gas filtered by demisting is passed into the lower part of the first absorption tower for absorption treatment. In the absorption treatment process, 25% oleum finally obtained in this step is used, and after being cooled by the pump and heat exchanger, it is carr...

Embodiment 3

[0050] A kind of production method that utilizes nonferrous smelting flue gas to produce electronic-grade sulfuric acid, the difference with embodiment 2 is:

[0051] Step (1) During the preparation of oleum, the temperature in the high-temperature filter is set to 190°C. SO 3 The fan is made of duplex stainless steel and 30408 ​​material; the high temperature filter is made of 30408 ​​material, and the filter element is imported glass fiber.

[0052] Step (3) During the preparation of high-purity sulfuric acid, the high-purity sulfuric acid obtained after cooling in this step and electronic-grade ultrapure water are transported to the heat exchanger through a magnetic pump for heat exchange, and then the sulfuric acid is sent to the electronic level sulfuric acid absorption tower.

[0053] After testing, the sulfuric acid produced by the method using non-ferrous smelting flue gas as a raw material has reached the international SEMI-C12 standard.

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Abstract

The invention discloses a production method for producing electronic-grade sulfuric acid by using nonferrous smelting flue gas. The invention relies on the nonferrous smelting acid production system, uses oleum to absorb sulfur trioxide, and simultaneously evaporates sulfur trioxide twice , so that the impurities in the smelting flue gas are completely removed, and the purity of the sulfuric acid product reaches the SEMI‑C12 standard. At the same time, the present invention utilizes system flue gas and sulfuric acid waste heat for heating, avoids unsafe heating by steam or other methods, reduces energy consumption, and reduces production costs. The invention solves the problem that electronic-grade sulfuric acid cannot be directly produced from non-ferrous smelting flue gas in the prior art, and the process provided is safe and reliable, the product quality can reach the PPT level standard required by integrated circuits, and large-scale continuous production can be realized.

Description

technical field [0001] The invention belongs to the technical field of electronic-grade sulfuric acid preparation, and more specifically relates to a method for preparing electronic-grade sulfuric acid by using nonferrous smelting flue gas. Background technique [0002] Electronic-grade sulfuric acid, also known as high-purity sulfuric acid or ultra-pure sulfuric acid, is an ultra-clean and high-purity reagent that is widely used in the cleaning and etching of silicon wafers in the assembly and processing of semiconductors and VLSI. With the development of integrated circuits (IC) to large-scale, ultra-large-scale, and extremely large-scale, the integration of chips is getting higher and higher, the photolithographic lines on the surface of the wafer are getting thinner, and the quality requirements for electronic grade sulfuric acid are getting higher and higher. strict. In the prior art, electronic-grade sulfuric acid is mainly prepared by industrial sulfuric acid rectifi...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C01B17/74
CPCC01B17/74Y02P20/129
Inventor 何福亮何志军何占源李之军张红福徐刚
Owner 岷山环能高科股份公司