Communication wave band infrared detector and preparation method thereof
An infrared detector and band technology, applied in the field of detectors, can solve the problems of reducing device sensitivity and response time, Fermi level pinning effect, large dark current and noise, and achieve high mobility and adjustable gate voltage Sexuality, favorable for large-scale preparation and application, fast response effect
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[0028] The present invention will be described in further detail below.
[0029] figure 1 Among them, a contains Bi 2 S 3 The optical microscope image of the infrared detector of the nanosheet, b is the optical microscope image of the infrared detector of the present invention, and c is the structural schematic diagram of the infrared detector of the present invention. Such as figure 1 As shown, the communication band infrared detector of the present invention includes: a substrate, which includes a Si substrate and SiO on the surface of the Si substrate. 2 layer, on SiO 2 Bi on the layer surface 2 S 3 The nanosheet channel layer, located at the Bi 2 S 3 An electrode layer on the surface of the nanoflake channel layer, with openings in the electrode layer exposing the Bi 2 S 3 The surface of the nanoflake channel layer, and the large-sized PbS quantum dot layer grown in the opening, Bi 2 S 3 Due to the large number of surface dangling bonds in the S space on the su...
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