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Multi-layer nano-film suitable for titanium alloy surface and preparation method thereof

A nano-multi-layer, titanium alloy technology, applied in the direction of metal material coating process, coating, vacuum evaporation plating, etc., can solve the problems of unsatisfactory bonding force and internal stress, and achieve low internal stress and high resistance to friction and wear The effect of high performance and film hardness

Active Publication Date: 2019-09-10
CHONGQING UNIV OF ARTS & SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

If the aluminum-doped diamond-like film is directly prepared on the surface of the titanium alloy, although the bonding force of the film matrix can be improved to a certain extent and the internal stress can be reduced, the bonding force and internal stress still cannot meet the requirements of high-intensity operations such as aerospace and geological drilling. field

Method used

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  • Multi-layer nano-film suitable for titanium alloy surface and preparation method thereof
  • Multi-layer nano-film suitable for titanium alloy surface and preparation method thereof
  • Multi-layer nano-film suitable for titanium alloy surface and preparation method thereof

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Embodiment 1

[0041] A kind of nanometer multi-layer thin film that is applicable to the surface of titanium alloy, it is characterized in that, it is made of five thin film layers; From the titanium alloy surface outwards successively is titanium nitride thin film layer, and its thickness is about 190nm; Titanium carbide thin film layer , its thickness is about 190nm; titanium nitride film layer, its thickness is about 190nm; titanium carbide film layer, its thickness is about 190nm; aluminum-doped diamond-like film layer, its thickness is about 240nm; The thickness is about 1000nm.

Embodiment 2

[0043] A kind of nanometer multi-layer thin film that is applicable to the surface of titanium alloy is characterized in that, it is made of five thin film layers; From the surface of titanium alloy outwards is the titanium nitride thin film layer successively, and its thickness is about 200nm; Titanium carbide thin film layer , its thickness is about 200nm; titanium nitride film layer, its thickness is about 200nm; titanium carbide film layer, its thickness is about 200nm; aluminum-doped diamond-like film layer, its thickness is about 250nm; The thickness is about 1050nm.

Embodiment 3

[0045] A kind of nanometer multi-layer thin film that is applicable to the surface of titanium alloy, it is characterized in that, it is made of five thin film layers; From the titanium alloy surface outwards successively is titanium nitride thin film layer, and its thickness is about 250nm; Titanium carbide thin film layer , its thickness is about 250nm; titanium nitride film layer, its thickness is about 250nm; titanium carbide film layer, its thickness is about 250nm; aluminum-doped diamond-like film layer, its thickness is about 250nm; The thickness is about 1250nm.

[0046] The nano-multilayer film suitable for the surface of titanium alloy obtained in the above-mentioned embodiments 1-3 is prepared by the following system and method:

[0047] A preparation system for nano-multilayer films suitable for the surface of titanium alloys, using electron cyclotron resonance (ECR), two sets of target intermediate frequency magnetron sputtering devices, and a set of ring target D...

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Abstract

The invention provides a multi-layer nano-film suitable for a titanium alloy surface and a preparation method thereof. The multi-layer film comprises a titanium nitride film layer, a titanium carbidefilm layer, a titanium nitride film layer, a titanium carbide film layer and an aluminum-doped diamond-like film layer from the titanium alloy surface to outside in sequence. The preparation method ofthe multi-layer nano-film comprises the steps of conducting cleaning and vacuumizing on a titanium alloy base body, conducting sputtering deposition to form the titanium nitride film layer, conducting sputtering deposition to form the titanium carbide film layer, conducting repeated deposition to form one titanium nitride film layer and the titanium carbide film layer respectively, preparing onealuminum-doped diamond-like film layer, and finally conducting sputtering after-treatment. Compared with the prior art, the preparation method has the advantages that the rate of finished multi-layerfilm products is high, and the preparation process is convenient, quick and efficient; the bonding force between the prepared film and the prepared base body and between the films is large, and the internal stress is small; and the multi-layer nano-film has good frictional wear resistance and is applicable to the high-intensity operation fields such as aerospace and geological drilling.

Description

technical field [0001] The invention relates to the technical field of nano-film materials, in particular to a nano-multilayer film suitable for the surface of a titanium alloy and a preparation method thereof. Background technique [0002] Titanium alloy is a new type of structural material, which is widely used in various fields at present, but its disadvantages such as low hardness, high friction coefficient, and poor wear resistance limit its application. Therefore, it is necessary to modify the surface of titanium alloys to prepare functional multilayer films to make them more widely used. [0003] Diamond-like carbon (DLC) films have excellent properties such as high hardness, high wear resistance, and low coefficient of friction. Internal stress and other problems, resulting in delamination, peeling and failure. The introduction of metal Al into the diamond-like carbon film can effectively reduce the internal stress of the film, and at the same time increase the tou...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/06C23C14/35
CPCC23C14/0036C23C14/0605C23C14/0635C23C14/0641C23C14/3407C23C14/352C23C14/355
Inventor 徐照英胡卿卿王锦标苏永要张腾飞伍太宾
Owner CHONGQING UNIV OF ARTS & SCI
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