Photoelectric detector with graphene sandwich structure
A technology of photodetector and graphene layer, which is applied in the field of photoelectric detection, can solve the problems of small gain and weak signal response ability, and achieve high gain effect, good response effect and high gain detection effect
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Embodiment 1
[0036] combined with figure 1 shown. The photodetector comprising the graphene sandwich structure of the present invention includes a light absorbing layer 1 (1), a graphene layer (2), and a light absorbing layer 2 (3) successively from bottom to top, and the graphene layer (2) It is placed between the light-absorbing layer (1) and the light-absorbing layer 2 (3) to form a sandwich structure; the surface of the graphene layer (2) is also provided with a metal electrode (4).
[0037] The material of the light-absorbing layer 1 (1) is a short-wave absorbing material that does not absorb long-wave; the graphene layer (2) provides high-gain carriers for the light-absorbing layer 1 (1) and the light-absorbing layer 2 (3) at the same time transport channel. The material of the light-absorbing layer 1 (1) is a single crystal silicon sheet; the material of the light-absorbing layer 2 (3) is a quantum dot material, preferably a PbS sol-type quantum dot material.
[0038] The photode...
Embodiment 2
[0040] Fabrication method of photodetector
[0041] 1. Preparation of thinned single crystal silicon. Select monocrystalline silicon to be etched to about 10 μm with KOH solution first, then fix the substrate on a quartz substrate spin-coated with polyimide and perform a drying process at about 300 ° C, and then use KOH solution for secondary etching to remove the single crystal The silicon is thinned to a cut-off wavelength absorption thickness of about 1.1 μm.
[0042] 2. Graphene preparation. The graphene film was prepared by chemical vapor deposition equipment, the growth substrate was flat copper foil, and the raw material was analytical pure ethanol. Under the action of high temperature, carbon atoms in ethanol are deposited on the surface of the substrate to form a graphene film after adsorption and migration on the copper substrate. The number of layers of the finally obtained graphene film is controlled at 1-2 layers.
[0043]3. Graphene transfer. The transfer of...
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