Interdigital large-area flexible array sensor and preparation method thereof

Abstract

The invention relates to the field of sensors, and discloses an interdigital large-area flexible array sensor and a preparation method thereof. The sensor comprises an electrode plate provided with aninterdigital array electrode and leads, a flexible substrate, and an array pressure-sensitive layer and an insulating glue layer which are arranged between the electrode plate and the flexible substrate, wherein the interdigital array electrode comprises a plurality of array units containing the same interdigital electrodes; the leads comprise row leads and column leads; and the two ends of eachinterdigital electrode are respectively connected to the corresponding row lead and the corresponding column lead. The preparation method comprises the following steps of preparing the electrode plateby adopting a silk-screen printing process; preparing a pressure-sensitive composite material; printing the uncured pressure-sensitive composite material on the array units on the electrode plate byadopting the silk-screen printing process in order to form the array pressure-sensitive layer; and laminating the electrode plate and the flexible substrate through an insulating glue. The method is simple in process, higher in efficiency and low in cost, and the prepared large-area high-density flexible array sensor is high in sensitivity, good in stability and wide in pressure sensing range.

Description

technical field [0001] The invention relates to the field of sensors, in particular to an interdigitated large-area flexible array sensor and a preparation method thereof. Background technique [0002] With the improvement of science and technology and modernization level, people have higher and higher requirements for pressure monitoring. It is no longer limited to pressure monitoring on regular rigid surfaces, and there are various forms. Ordinary rigid sensors can no longer meet people's actual needs. . Flexible pressure sensors can be bent or even folded at will, small in size, thin in thickness, flexible materials are basically non-toxic and harmless, and have good compatibility with the human body. A lot of research and application have been done. [0003] In recent years, with the rapid development of robotic bionic skin, flexible wearable devices and other fields, people's demand for large-area and high-density flexible sensor arrays has continued to increase. Sen...

AI Technical Summary

Problems solved by technology

[0007] The first purpose of the present invention is to overcome the low material utilization rate and high production cost in the prior art when the traditional photolithography process is used to prepare large-area flexible array sensors. When large-area integration, if the array density is high, the It will lead to the problems that the efficiency is too low and the preparation is too difficult. An interdigitated large-area flexible array sensor and its preparation method are provided, which are prepared by a full screen printing process. The process is simple, the efficiency is high, and the cost is low. And the prepared The large-area flexible array sensor has high sensitivity, good stability and large pressure sensing range

[0008] The second object of the present invention is to overcome the problem that the upper and lower plates of the sensors with the “sandwich” structure in the prior art must be precisely aligned during packaging, which requires high technology and reduces the packaging efficiency of the sensor. If there is no alignment, it will For the problem affecting the performance of the sensor, an interdigitated large-area flexible array sensor and its preparation method are provided. The interdigitated electrodes are used in the sensor, and the electrodes can be made on the same substrate material, which avoids the problem of precise alignment of the upper and lower electrode arrays. Process flow, improving assembly efficiency

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