Mzi-type optical waveguide hybrid integrated thermo-optic switch with graphene-doped trapezoidal cladding and its preparation method
A technology integrating thermo-optic and optical waveguide, applied in the direction of optical waveguide light guide, light guide, optics, etc., can solve the problems of long switching time, low thermal conductivity, large power consumption, etc., reduce switching time, improve thermal conductivity, and realize The effect of control
Active Publication Date: 2020-06-02
JILIN UNIV
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Problems solved by technology
The polymer material doped with single-layer graphene dispersion is used instead of the traditional polymer material to solve the problems of high power consumption and long switching time caused by the low thermal conductivity of the polymer. The schematic diagram of the structure is shown in the attachment. figure 1 shown
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Embodiment 1
[0038] (1) Selection and cleaning of the substrate
[0039] Silicon-based silicon dioxide is used as the substrate 1 (the thickness of the silicon dioxide layer is 5 μm), and the surface of the substrate needs to be cleaned; first, the substrate is cleaned with an acetone solution to remove organic impurities on the surface of the substrate, and then cleaned with an ethanol solution Substrate to remove residual acetone solution, and finally use deionized water to rinse the substrate repeatedly to remove the ethanol solution on the surface, and then use the ear cleaning ball to blow off the deionized water on the surface of the substrate;
[0040] (2) preparing the waveguide core layer;
[0041] Spin-coat the photosensitive polymer core material (negative SU-8-2002) on the surface of the silicon dioxide layer, the spin-coating speed is 3000r / min, and the spin-coating time is 30s; The baking temperature is 90°C, the pre-baking time is 30 minutes, and a photosensitive polymer co...
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Abstract
The invention relates to an MZI type optical waveguide hybrid integrated thermo-optical switch with a graphene doped trapezoidal cladding, and a preparation method of the switch, and belongs to the technical field of optical waveguide type thermo-optical switch preparation. The method comprises the following steps: spin-coating a silicon dioxide substrate with a photosensitive polymer core layer material; performing photoetching on the photosensitive polymer core layer material by adopting a mask to obtain an optical waveguide core layer; then performing spin-coating of a graphene-doped polymer cladding material, evaporating of a metal film, spin-coating of a photoresist, registering and photoetching, and developing to prepare an electrode pattern; and finally performing cleavage so as toprepare the MZI type optical waveguide hybrid integrated thermo-optical switch with the graphene-doped trapezoidal cladding on the substrate. According to the method, the trapezoidal cladding structure is used for replacing a flat cladding structure, so that the heating efficiency of an electrode is improved; and the polymer material doped with single-layer graphene dispersion liquid is adopted toreplace a traditional polymer material, so that the problems of high power consumption and long switch time caused by low heat conductivity of polymer are solved. The method has the excellent effectsof simple process flow, high preparation precision and the like.
Description
technical field [0001] The invention belongs to the technical field of optical waveguide thermo-optic switch preparation, and in particular relates to a graphene-doped trapezoidal cladding MZI type optical waveguide hybrid integrated thermo-optic switch and a preparation method thereof. Background technique [0002] Optical switches are important devices in the field of optical communications. Thermo-optical switches use the thermo-optic effect of materials to realize switching functions. Waveguide thermo-optic switches have the advantages of compact structure and large-scale integration. Existing waveguide thermo-optic switches are mainly heated by metal electrodes, through which the electrodes generate heat to achieve temperature changes, and use the thermo-optic effect brought by temperature to change the refractive index of waveguide materials, thereby realizing the switching function. [0003] From the division of optical waveguide thermo-optic switch materials, thermo...
Claims
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IPC IPC(8): G02B6/138G02B6/13G02F1/01
CPCG02B6/13G02B6/138G02F1/011G02F1/0147G02F1/0113
Inventor 衣云骥吕佳文曹悦林柏竹杨悦孙小强王菲张大明
Owner JILIN UNIV
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