Polarization-independent double-ridge indium-phosphorus-based optical mixer and preparation method thereof

Abstract

The invention discloses a polarization-independent double-ridge indium-phosphorus-based optical mixer and a preparation method thereof, and the optical mixer comprises an epitaxial wafer device layerwhich is formed on an indium phosphide substrate; wherein the epitaxial wafer device layer comprises a multi-mode interference region and is used for realizing polarization independence; the multi-mode interference region is a double-ridge waveguide and is used for suppressing excitation of more high-order modes in the multi-mode interference region and improving the output phase accuracy of the mixer; the epitaxial wafer device layer further comprises anti-reflection films, and the anti-reflection films are formed at the two ends of the epitaxial wafer device layer; and the optical mixer alsocomprises a silicon dioxide upper cladding which is formed on the epitaxial wafer device layer, so that the stability of the epitaxial wafer device layer is improved. The indium-phosphorus-based optical mixer provided by the invention can be directly prepared through a photoetching process, and has the comprehensive properties of low process cost, device miniaturization, polarization independence, high phase accuracy, compatibility of a preparation process and a CMOS process, and easiness in batch preparation.

Description

technical field [0001] The invention relates to the field of coherent optical communication, in particular to a polarization-independent double-ridge indium phosphorus-based optical mixer and a preparation method thereof. Background technique [0002] In the face of increasing communication rate and bandwidth requirements, coherent optical communication can solve the problem of increasing channel information bits in data centers. The advent and development of 400G communication rate and 5G will be inseparable from coherent optical communication system. Coherent optical communication is a new type of communication system that uses a local oscillator light source at the receiving end to coherently demodulate the received signal. The development of coherent optical communication systems has greatly improved the transmission rate, transmission capacity and transmission distance of traditional optical communication systems. The key to its development lies in the application of co...

AI Technical Summary

Problems solved by technology

However, so far there is no laser source capable of outputting a single polarization state

This adds significant complexity to mixer performance detection and mode of operation

[0005] The deep etching technology can further increase the refractive index difference of the InP optical waveguide, but on the other hand, it will also cause more high-order modes to be excited in the multimode interference area, resulting in blurred imaging at the interference position, which seriously affects the mixer. Phase Accuracy

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