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A zirconium tantalum boron coating and its preparation method and application

A zirconium tantalum boron and boron coating technology is applied in the field of zirconium tantalum boron coating and its preparation, which can solve the problems affecting the high temperature mechanical properties and oxidation resistance of materials, and achieve the effect of improving application potential, high hardness and toughness

Active Publication Date: 2020-09-08
JILIN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the traditional method of using additives will introduce a second phase into the material, which will affect the high-temperature mechanical properties and oxidation resistance of the material. This effect is more obvious in the coating as the size of the material decreases.

Method used

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  • A zirconium tantalum boron coating and its preparation method and application
  • A zirconium tantalum boron coating and its preparation method and application
  • A zirconium tantalum boron coating and its preparation method and application

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preparation example Construction

[0023] The invention provides a method for preparing a zirconium tantalum boron coating, comprising the following steps: using ZrB 4 target and TaB 2 The target is a target material, and the zirconium tantalum boron coating is obtained by sputtering on the surface of the substrate by using a magnetron sputtering method.

[0024] In the present invention, the ZrB 4 The purity of the target is preferably 99 to 99.99%; the ZrB 4 The target is preferably a cylinder with a diameter of preferably 40-80 mm, more preferably 60 mm, and a thickness of 5 mm. In the present invention, the ZrB 4 The target is preferably subjected to pre-sputtering to remove impurities such as oxides on the surface of the target. In the present invention, the pre-sputtering is preferably carried out under an argon atmosphere, and ZrB during the pre-sputtering 4 The power of the target is preferably 100W, and the time is preferably 15-20min. In the present invention, during the pre-sputtering process, ...

Embodiment 1

[0039] Substrate pretreatment: before loading the single crystal sapphire (0001) substrate and polished titanium sheet into the coating chamber, ultrasonic cleaning should be performed on them. Ethanol and deionized water were sonicated for 15 minutes and then taken out, and each step was dried with nitrogen to obtain a substrate with a clean surface;

[0040] Place the target and evacuate the coating chamber: ZrB 4 target and TaB 2 Put the target into the target stage, then put the sapphire substrate and polished titanium sheet into the sample tray, such as Figure 5 As shown, close the coating chamber, close the vent valve, and then use the mechanical pump and the molecular pump to pump the pressure of the coating chamber to 6×10 -4 Pa;

[0041] Pre-sputtering: Before sample preparation, in order to remove impurities such as oxides on the surface of the target, it is necessary to sputter the target in an argon atmosphere for 20 minutes; keep the sample baffle closed durin...

Embodiment 2

[0045] The preparation method is substantially the same as in Example 1, except that TaB 2 The target power was 50W. The atomic content of Zr in the obtained zirconium tantalum boron coating is 19%, the atomic content of Ta is 14.8%, and the atomic content of B is 66.2%. Wear rate 9.2×10 -13 m 3 / Nm.

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Abstract

The invention relates to the technical field of coating preparation, in particular to a zirconium-tantalum-boron coating and a preparation method and application thereof. The preparation method of thezirconium-tantalum-boron coating comprises the following steps that a ZrB4 target and a TaB2 target are taken as a target material, a magnetron sputtering method is utilized, and the zirconium-tantalum-boron coating is obtained on the surface of a substrate through sputtering. By adopting the method, the zirconium-tantalum-boron coating with a Zr(Ta)B2 solid solution structure can be obtained, the coating has the advantages of higher hardness, higher toughness and higher wear resistance at high temperature, the hardness of the zirconium-tantalum-boron coating is 28.3-43.2 GPa, the coating isnot worn out under the condition of 500 DEG C, and the application potential of the zirconium-tantalum-boron coating in the fields such as aerospace materials or high-temperature cutting tools is improved.

Description

technical field [0001] The invention relates to the technical field of coating preparation, in particular to a zirconium tantalum boron coating, a preparation method and application thereof. Background technique [0002] With the rapid development of the aerospace industry, transition metal borides (TMB2) have entered people's field of vision as a new generation of ultra-high temperature ceramics. This ceramic has a high hardness and melting point due to the strong covalent bond between its metal atoms and boron atoms. At the same time, the hexagonal crystal structure of transition metal borides also makes the material have better comprehensive properties than cubic transition metal carbides (TMC) and transition metal nitrides (TMN), especially the first The above situation is more obvious for the transition group metal borides of the IVB, VB, and VIB groups; its structural advantages are also reflected in the ultra-high thermodynamic stability of TMB2 with a crystal space ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/35C23C14/06
CPCC23C14/067C23C14/352
Inventor 张侃谷鑫磊文懋郑伟涛
Owner JILIN UNIV