Terahertz metamaterial biosensor and preparation method and detection method thereof

A biosensor and metamaterial technology, which is applied in the analysis of materials, material analysis by optical means, instruments, etc., can solve the problems of complex operation, long time, and inability to meet rapid detection, and achieve high sensitivity and reliability.

Active Publication Date: 2019-12-31
INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] Early clinical diagnostic methods for a certain protein concentration in serum samples mainly used some biochemical methods, such as enzyme-linked reaction (ELISA), Wes

Method used

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  • Terahertz metamaterial biosensor and preparation method and detection method thereof
  • Terahertz metamaterial biosensor and preparation method and detection method thereof
  • Terahertz metamaterial biosensor and preparation method and detection method thereof

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preparation example Construction

[0084] The metal preparation method is: the bottom metal layer growth method is electroplating or magnetron sputtering, and the surface layer gold growth method is electron beam evaporation.

[0085] In some embodiments of the present invention, the response waveband of the biosensor is in the terahertz range, and the waveband range is 0.5-3 THz.

[0086] In some embodiments of the present invention, the antibodies or probes that recognize different cancer markers modified on the metamaterial are: CEA (carcinoembryonic antigen), CA125 (glycoprotein antigen 125), AFP (alpha-fetoprotein) , CA15-3 (glycoprotein antigen 15-3), GGT-II (glutamyl transpeptidase isoenzyme II), CA19-9 (glycoprotein antigen 19-9), CA42 (glycoprotein antigen 42), microRNA4484 , MicroRNA3646 and other conventional cancer marker antibodies and microRNA probes.

[0087] The detection method of the negative refractive index terahertz metamaterial biosensor used for cancer early warning as described above, the prin...

Embodiment 1

[0133] Prepare the negative refractive index terahertz metamaterial biosensor according to the following steps:

[0134] (1) Substrate preparation: Boil for 8 minutes in acetone solution to remove organic contaminants on the surface of the substrate before the metamaterial processing process, then boil with absolute ethanol solution for 10 minutes to remove acetone, and finally rinse with deionized water. Blow dry with nitrogen.

[0135] (2) Metamaterial structure construction:

[0136] Using micro-nano processing lithography technology to realize the transfer of metamaterial patterns on the substrate. First, the photoresist (AR-N4340) is coated on the previously processed substrate by spin coating. Bake for 15 minutes before 95°C, expose to build those metamaterial structures on the substrate, and bake for 10 minutes after 105°C.

[0137] The prepared metamaterial structure is a rotating double ring structure, the metamaterial pattern is a rotating double split ring, the rotation a...

Embodiment 2

[0146] This embodiment is basically the same as Embodiment 1, except that:

[0147] In step (4), the substrate is a 300 μm silicon substrate, which is reduced to 150 μm through a substrate thinning process. After the thinning process, it should be boiled in acetone solution for 10 minutes to remove organic contaminants on the surface of the substrate, then boiled with anhydrous ethanol solution for 15 minutes to remove acetone, and finally rinsed with deionized water three times and dried with nitrogen.

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Abstract

The invention discloses a terahertz metamaterial biosensor and a preparation method and detection method thereof. The biosensor comprises a substrate, a metamaterial structure, and identification units. The metamaterial structure arranged on the substrate is used for responding to terahertz waves; and a plurality of detection areas are arranged on the metamaterial structure. The identification units modified on the detection areas are used for identifying different markers. According to the terahertz metamaterial biosensor, the adopted metamaterial has an asymmetric high-Q-value structure andis sensitive to the change response of surrounding environment media highly; the cancer marker is combined with the surface of the metamaterial structure to cause the red shift of a terahertz transmission spectrum; and the concentration of the cancer marker and peak position shift are in functional correlation. The concentration of the marker in the serum of a patient can be detected by a comparison curve of the detection concentration of the marker and the terahertz transmission spectrum.

Description

Technical field [0001] The invention relates to the field of biological detection, in particular to a terahertz metamaterial biosensor and a preparation method and a detection method thereof. Background technique [0002] In the early stages of cancer development, there is often no obvious disease signal, which is often ignored by patients. When there are symptoms, the cancer has developed to a high degree or has metastasized. Studies have shown that different cancer marker proteins are produced after cancer cells are formed, which can help people diagnose whether there are corresponding cancer cells in the body. Therefore, the concentration of cancer marker protein plays a key role in early cancer diagnosis. [0003] Terahertz spectroscopy technology has the advantages of immediacy, label-free and non-destructive testing. With the development of micro-nano processing technology, terahertz sensors based on metamaterials have received great attention. By changing the structure and...

Claims

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Application Information

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IPC IPC(8): G01N33/531G01N21/3581G01N33/536G01N33/574
CPCG01N21/3581G01N33/531G01N33/536G01N33/574
Inventor 崔宁关敏徐梦轲张杨曾一平
Owner INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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