Micro-hemispherical resonator gyro structure, assembly method and wafer fixture

Abstract

The invention relates to a micro-hemispherical resonator gyro structure, an assembly method and a wafer fixture. The invention discloses a micro-hemispherical resonator gyro structure wafer level assembly method, comprising the following steps: performing high temperature softening deformation machining and forming on independently manufactured glass sheets, then forming a micro-hemispherical resonant structures in the middle of each glass sheet, cutting glass sheet locating holes at the two ends of each glass sheet by adopting laser cutting, and by taking the locating holes as a benchmark, aligning multiple micro-hemispherical resonant structures which are the same and fixing the same micro-hemispherical resonant structures on the wafer fixture; and then performing operations by taking the wafer fixture as a unit, and completing subsequent processes, namely micro-hemispherical resonant structure releasing, surface metallization, fixation with a planar electrode, separation from the wafer fixture as well as cleaning, thus the micro-hemispherical resonator gyro structure driven by the planar electrode at the bottom is obtained. The micro-hemispherical resonator gyro structure waferlevel assembly method disclosed by the invention fixes and mounts multiple independently manufactured micro-hemispherical resonant structures on the same wafer fixture, a wafer level mounting operation is realized, an assembly error of the micro-hemispherical resonator gyro structure can be obviously reduced, stability and consistency of the processes as well as assembly efficiency are improved.

Description

technical field [0001] The invention relates to the technical field of micro-electromechanical system manufacturing, in particular to a microhemispherical resonant gyro structure, an assembly method for the microhemispherical resonant gyro structure, and a wafer fixture for the microhemispherical resonant gyro structure. Background technique [0002] Gyroscopes are sensors that measure the angular motion of carriers in inertial space. They are the basic core components of inertial navigation and attitude measurement systems. They have very important application values ​​in precision guidance, unmanned systems, oil exploration, stable platforms, and space vehicles. [0003] Resonant gyroscope is a kind of gyroscope, which has the advantages of less parts, high reliability and long working life, and has been widely used. The micro-hemispheric resonant gyroscope is a new type of resonant gyroscope. The manufacturing technology of the micro-hemispherical resonant gyroscope inclu...

AI Technical Summary

Problems solved by technology

[0005] In order to overcome the problems of low assembly accuracy, poor assembly consistency, and low assembly efficiency of the existing micro-hemispherical resonant gyroscope assembly technology, the present invention provides a wafer-level assembly method for a micro-hemispherical resonant gyroscope, which is based on the layout of the bottom plane electrodes, which can significantly Improve assembly accuracy, assembly consistency, stability and assembly efficiency

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