The invention relates to a micro-hemispherical
resonator gyro structure, an
assembly method and a
wafer fixture. The invention discloses a micro-hemispherical
resonator gyro structure
wafer level
assembly method, comprising the following steps: performing high temperature
softening deformation
machining and forming on independently manufactured glass sheets, then forming a micro-hemispherical resonant structures in the middle of each
glass sheet,
cutting glass sheet locating holes at the two ends of each
glass sheet by adopting
laser cutting, and by taking the locating holes as a benchmark, aligning multiple micro-hemispherical resonant structures which are the same and fixing the same micro-hemispherical resonant structures on the
wafer fixture; and then performing operations by taking the wafer fixture as a unit, and completing subsequent processes, namely micro-hemispherical resonant structure releasing, surface metallization, fixation with a
planar electrode, separation from the wafer fixture as well as cleaning, thus the micro-hemispherical
resonator gyro structure driven by the
planar electrode at the bottom is obtained. The micro-hemispherical resonator gyro structure waferlevel
assembly method disclosed by the invention fixes and mounts multiple independently manufactured micro-hemispherical resonant structures on the same wafer fixture, a wafer level mounting operation is realized, an assembly error of the micro-hemispherical resonator gyro structure can be obviously reduced, stability and consistency of the processes as well as assembly efficiency are improved.