Design and optimization method of waveguide display sub-wavelength diffraction grating
A diffraction grating and optimization method technology, applied in optics, optical components, instruments, etc., can solve the problems of sub-wavelength diffraction gratings with many influencing factors, limiting the applicability of optimization methods, and the influence of efficiency distribution, so as to improve angle selectivity, spectrum The effect of flattening the response curve and improving the rationality
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[0109] Design a sub-wavelength grating with high-efficiency class 1 and flat efficiency with incident angle for a wavelength of 532nm, such as Figure 4 As shown, its structure is that a high refractive index tantalum pentoxide film layer 1, a gold film 2 and a fused silica film 3 are sequentially plated on a glass grating substrate 207, and a blazed grating is etched on the glass grating substrate 207. According to the design and optimization method proposed by the present invention, according to the incident angle [-20 °, 20 °] TE polarization mode, a reasonable objective function level 1 0.9 (range 0-1) is set, and the sub-wavelength grating period is generally smaller than the incident wavelength. The reasonable period constraint condition is less than 532nm, and the reasonable constraint condition of the thickness of the high refractive index film layer and the gold film layer is less than 500nm and greater than 10nm, and the number of iterations and the iteration threshol...
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