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Combustion furnace of exhaust gas treatment device based on AC electric field

An exhaust gas treatment device and AC electric field technology, which is applied to gas fuel burners, burners, combustion methods, etc., can solve problems that hinder the smooth combustion and discharge of exhaust gas, and achieve the effect of preventing adhesion

Pending Publication Date: 2020-03-06
SAITAMA UNIVERSITY +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] Dust composed of metal components contained in the exhaust gas generated along with the combustion of the exhaust gas adheres to and grows on the inner surface of the combustion chamber, thereby hindering the smooth combustion and discharge of the exhaust gas.

Method used

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  • Combustion furnace of exhaust gas treatment device based on AC electric field
  • Combustion furnace of exhaust gas treatment device based on AC electric field

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Embodiment Construction

[0055] Hereinafter, the combustion furnace of the present invention will be described. The combustion furnace of the present invention is used in a harmful exhaust gas treatment device (hereinafter referred to as "exhaust gas treatment device") based on an alternating electric field, and thermally decomposes exhaust gas containing harmful components discharged from a semiconductor manufacturing device and a liquid crystal panel manufacturing device Or burn to eliminate harm.

[0056] In particular, it is to prevent the dust generated along with the combustion of the exhaust gas from adhering to the inner surface of the cylinder constituting the combustion furnace, or even if the dust adheres to the inner surface, it is prevented from being detached and not solidified. In addition, by applying a magnetic field to the cylinder, the combusted and plasmaized exhaust gas swirls in a spiral shape, thereby increasing the distance of flow in the high-temperature region and promoting d...

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Abstract

The invention provides a combustion furnace of an exhaust gas treatment device based on an AC electric field capable of preventing the adhesion of dust to an inner surface of a cylindrical body and improving the efficiency of detoxifying. The combustion furnace (A) of an exhaust gas treatment device for exhausting an exhaust gas by burning or decomposing the exhaust gas at high temperature comprises, an electrically conductive cylindrical body (1) having a closed end part at one side and an open end part on the other side; an exhaust gas supply port (9) arranged on the closed end part side ofthe cylindrical body; a burner (8) arranged on the closed end part side of the cylindrical body; and an AC power supply (10) connected to the cylindrical body.

Description

technical field [0001] The present invention relates to, for example, a combustion furnace of a harmful exhaust gas treatment device based on an alternating electric field that burns or thermally decomposes exhaust gas discharged from a semiconductor manufacturing process to remove harmful substances. Background technique [0002] It is known that silane (SiH 4 ), disilane (Si 2 h 6 ), diborane (B 2 h 6 ), phosphine (PH 3 ), arsine (AsH 3 ), nitrogen trifluoride (NF 3 ) and other toxic exhaust gas, carbon tetrafluoride (CF 4 ), sulfur hexafluoride (SF 6 ) etc., such as fluoride, etc., which have adverse effects on the global environment. Moreover, when such exhaust gas is released to the atmosphere, it is required to eliminate the harmful effects in advance. [0003] Therefore, a toxic waste gas treatment method and device have been proposed, which can satisfy the above-mentioned requirements by combusting the above-mentioned waste gas, detoxifying it, and releasin...

Claims

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Application Information

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IPC IPC(8): F23G7/06F23G5/44F23D14/68F23J1/00B06B1/02
CPCF23G7/06F23G5/44F23D14/68F23J1/00B06B1/02
Inventor 王青躍金丙哲星野铁郎小菅一生
Owner SAITAMA UNIVERSITY