Method for manufacturing superconducting cable conductor film

A superconducting cable and thin film technology, which is applied in ion implantation plating, metal material coating process, coating, etc., can solve the problems of inability to deposit uniform thin films on non-planar substrates, small thin film area, and poor uniformity, so as to avoid Diaphragm leak phenomenon, simple equipment, good density effect

Inactive Publication Date: 2020-03-24
河北环亚线缆有限公司
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Problems solved by technology

[0007] (2) The film area of ​​preparation is little, and uniformity is poor;
[0008] (3) It is not effective to deposit uniform thin films on non-planar substrates

Method used

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  • Method for manufacturing superconducting cable conductor film

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Embodiment Construction

[0022] A method for manufacturing a film for a superconducting cable conductor, using a pulsed laser deposition molecular beam epitaxy film preparation system to produce a substrate film, such as figure 1 As shown, all components of the system are thickened stainless steel components, equipped with two-way observation port, laser bombardment window 1, gas inlet and outlet 2, equipped with turbomolecular pump, excimer pulse laser 3. The subject part is the substrate surface deposition chamber. The deposition chamber is equipped with a laser bombardment target seat 4, a rotating substrate heating base 5, a laser bombardment window 1 and the like. The spare materials include cylindrical iron-based superconductor target 6, oxygen source, argon gas source, hydrochloric acid solution (50%), deionized water, acetone, an appropriate amount of absolute ethanol, and an ultrasonic generator.

[0023] Connect the equipment of the preparation system well, power on and debug and make it re...

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Abstract

The invention discloses a method for manufacturing a superconducting cable conductor film. A pulsed laser deposition molecular beam epitaxial film preparation system is used for producing a substratefilm, and the pulsed laser deposition molecular beam epitaxial film preparation system is equipped with a turbo molecular pump to evacuate a deposition chamber to be a vacuum. By means of the method,the wavelength and single-pulse energy of an excimer laser are increased, the pulse particle beam rate is accelerated, and a low pulse energy and high repetition frequency method is adopted to achievethe purpose of high-quality deposition of high-quality films. By means of the method, the distance between a target and a substrate is increased; and through multiple experiments, the distance between the target and the substrate is increased from the original 3.5 mm to 4 mm, so that the phenomenon of film holes caused by too small distance is effectively avoided, and the uneven thickness is alsoavoided. The method needs simple equipment, the technological process is simple and easy to control, the surface of the prepared iron-based superconducting thin film is flat, the density is good, andthe inner face 60-degree rotation double domain structure is formed in the surface.

Description

technical field [0001] The invention relates to the technical field of thin film preparation, in particular to a method for manufacturing a superconducting cable conductor thin film. Background technique [0002] At present, pulsed laser deposition thin film technology is widely used in the preparation and research of high-temperature superconducting thin films, ferroelectric thin films, photoelectric thin films, semiconductor thin films, metals, superhard material thin films, etc. as the most practical method. [0003] The complexity of the pulsed laser thin film deposition process itself is the main difference between it and other technologies. It not only needs to consider the interaction between the laser and the target, but also the transmission of the products of this action in space and the deposition on the substrate. There are also complex interactions between each process, so it is extremely difficult to describe the entire physical process with a complete mathemat...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/28C23C14/58
CPCC23C14/28C23C14/5806
Inventor 曹奎红马江飞马立明马曼昆曹琰
Owner 河北环亚线缆有限公司
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