A shape memory alloy radial gradient film and its preparation method

Abstract

The invention discloses a shape memory alloy radial gradient film and a preparation method thereof, belonging to the field of functionally gradient shape memory alloy films. The invention solves the technical problem that the thin film needs to be micro-sized and highly dense in a narrow space. The method of the present invention: one, the Si slices are ultrasonically cleaned with deionized water, acetone, and dehydrated alcohol in turn; two, the pattern of the design is transferred to the Si slices after step 1 by photolithography technology, so as to ensure that the groove depth of the Si slices is the same as that of a thin film Odd multiples of the thickness of the single layer; 3. Using double-target sputtering, alternately sputtering Ti and Ni onto the Si substrate treated in step 2 under the protection of an inert gas, and grinding it flat; 4. Then spin-coat PMMA, and then Place in HF solution to remove Si flakes, and smooth the protruding part; 5. Then place in acetone solution to remove PMMA; 6. Recrystallize and anneal. The invention is applied in the fields of biomedicine, aerospace and other fields. Traditional memory alloys generally can realize bending in one direction, while radial gradient films can realize bending in multiple directions.

Description

technical field [0001] The invention belongs to the field of functionally gradient shape memory alloy thin films; in particular, it relates to a shape memory alloy radially gradient thin film and a preparation method thereof. Background technique [0002] Functionally graded material is a heterogeneous composite material composed of two-phase or multi-phase materials whose structure and properties change continuously or quasi-continuously in the direction of material thickness or length. It has many excellent properties that ordinary composite materials do not have, such as eliminating Stress concentration, reducing residual stress, enhancing connection strength, reducing crack driving force, etc. Shape memory alloy is a new type of intelligent material, which has been widely used in military, aerospace, medical, biological and other fields due to its unique shape memory properties and pseudoelasticity. Functionally graded shape memory alloy is a new type of functional mate...

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Problems solved by technology

[0004] The present invention aims to provide shape memory alloy gradient films for tiny spaces and its preparation problems; the present invention combines sputtering shape memory alloys with magnetron sputtering and substrate topography design to prepare shape memory alloy radial gradient films, so that the products present different "Pattern", the invention solves the problem that the thin film needs to be micro-sized and highly dense in a narrow space, and the invention realizes mass rapid production

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