Rotating zirconium oxide target and preparation method thereof

A technology of zirconia and zirconia powder, which is applied in metal material coating process, ion implantation plating, coating, etc., can solve the problems of sparking and ablation on the surface of zirconia target materials, and achieve the uniformity of the overall resistivity High, high powder utilization, easy mass production effect

Inactive Publication Date: 2020-04-21
广州市尤特新材料有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] At present, the zirconia target is mainly prepared by the magnetron sputtering process, but in the process of magnetron sputtering, it is often found that the surface of the zirconia target is severely sparked, and even a large area is ablated to form pits

Method used

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  • Rotating zirconium oxide target and preparation method thereof
  • Rotating zirconium oxide target and preparation method thereof
  • Rotating zirconium oxide target and preparation method thereof

Examples

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preparation example Construction

[0026] The preparation method of the rotary zirconia target material of the present invention specifically comprises the following steps:

[0027] 1) Preparation of spray powder: select zirconia powder as the spray powder, and the D50 particle size of the zirconia powder is 20-70 μm, the purity is ≥99.5%, and the oxygen loss is ≥0.3wt%;

[0028] 2) Prepare the base tube: choose 304 non-magnetic stainless steel tube as the target base tube, use cast steel grit to sandblast the surface of the base tube, and then use copper-nickel wire or nickel-aluminum wire for arc priming, after priming treatment The surface roughness Ra of the substrate tube is 200-500μm;

[0029] 3) Plasma spraying: Install the base tube of the target material after primer treatment on the transmission equipment, and make it rotate around the central axis and move back and forth in the horizontal direction after passing hot water at 70-95 °C, and keep the spray gun fixed. When the surface temperature of the...

Embodiment 1

[0034] In this example, a zirconia target material with a thickness of 3 mm is prepared on 304 stainless steel, and the preparation method is as follows:

[0035] 1) Preparation of zirconia powder: the particle size requirement of the powder is that D50 is 70 μm, the purity is 99.5%, and the oxygen loss is 0.3wt%;

[0036] 2) Prepare the base tube: select a 304 non-magnetic stainless steel tube with a specification of ID80*OD88*L1220mm as the target base tube, use cast steel sand to sandblast the surface of the base tube, and then use a nickel-aluminum wire arc to prime;

[0037] 3) Plasma spraying: Install the base tube of the target material after primer treatment on the transmission equipment, and make it rotate around the central axis and move back and forth in the horizontal direction after being passed through the water, and the spray gun remains fixed. When the surface temperature of the substrate tube reaches above 40°C, the spray gun is ignited, and at the same time, ...

Embodiment 2

[0044] In this example, a zirconia target material with a thickness of 3.5mm is prepared on 304 stainless steel, and the preparation method is as follows:

[0045] 1) Preparation of zirconia powder: the particle size requirement of the powder is that D50 is 70 μm, the purity is 99.5%, and the oxygen loss is 0.35wt%;

[0046] 2) Prepare the base tube: select a 304 non-magnetic stainless steel tube with a specification of ID80*OD88*L1500mm as the target base tube, use cast steel sand to sandblast the surface of the base tube, and then use a nickel-aluminum wire arc to prime;

[0047] 3) Plasma spraying: Install the base tube of the target material after primer treatment on the transmission equipment, and make it rotate around the central axis and move back and forth in the horizontal direction after being passed through the water, and the spray gun remains fixed. When the surface temperature of the substrate tube reaches above 40°C, the spray gun is ignited, and at the same time...

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Abstract

The invention discloses a rotating zirconium oxide target and a preparation method thereof. The rotating zirconium oxide target selects high-purity zirconium oxide free of any dopant as spraying powder; by conducting plasma spraying in a tank under gas protection, intervention of air and other impurities is reduced; the prepared target is low in electrical resistivity and high in uniformity, the purity is larger than or equal to 99.5%, the relative density is larger than or equal to 95%, the dimension of the target is free of limitation, the thickness can reach 3-9 mm, the maximum length can reach 4000 mm, the grain size is small, the product yield is high, the powder utilization ratio is high, and mass production is easy.

Description

technical field [0001] The invention relates to the technical field of zirconia targets, in particular to a rotating zirconia target and a preparation method thereof. Background technique [0002] There are three known metallographic phases of zirconia: monoclinic phase (below 1170°C), tetragonal phase (1170°C to 2370°C) and cubic phase (above 2370°C). At present, ZrO is mainly increased by adding appropriate dopants, such as yttrium oxide, magnesium oxide, and cerium oxide, to zirconium dioxide. 2 The presence of these dopants is conducive to the formation of the cubic metallographic phase or tetragonal metallographic phase, so doped zirconia is also called stable zirconia. [0003] At present, the zirconia target is mainly prepared by the magnetron sputtering process, but during the magnetron sputtering process, it is often found that the surface of the zirconia target is severely sparked, and even a large area is ablated to form pits. This phenomenon is caused by arc di...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/34C23C4/11C23C4/134
CPCC23C14/3414C23C4/134C23C4/11
Inventor 吴健雷雨肖世洪周志宏周昭寅
Owner 广州市尤特新材料有限公司
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