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Method for processing metal-based hard coating transmission electron microscope in-situ mechanical sample by using focused ion beam

A focused ion beam, hard coating technology, used in the preparation of test samples, material analysis using wave/particle radiation, scientific instruments, etc. Deformation and fracture of hard coating materials

Active Publication Date: 2020-04-21
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The present invention aims to solve the problem that the currently commonly used transmission electron microscope in-situ mechanical test system cannot realize the best diffraction analysis conditions and obtain the best diffraction results, and the commonly used transmission electron microscope sample preparation technology cannot be accurately used in the transmission electron microscope in-situ mechanical test system. Analyze the deformation and fracture of metal-based hard coating materials during in-situ mechanical testing, and provide a method for processing metal-based hard coating transmission electron microscope in-situ mechanical samples with focused ion beams

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  • Method for processing metal-based hard coating transmission electron microscope in-situ mechanical sample by using focused ion beam
  • Method for processing metal-based hard coating transmission electron microscope in-situ mechanical sample by using focused ion beam
  • Method for processing metal-based hard coating transmission electron microscope in-situ mechanical sample by using focused ion beam

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specific Embodiment approach 1

[0029] Specific embodiment one: the present embodiment a kind of method of focused ion beam processing metal-based hard coating transmission electron microscope in-situ mechanical sample, it is finished according to the following steps:

[0030] 1. Pretreatment:

[0031] The metal substrate with a hard coating on the surface is used as the material to be tested, and the cross section of the material to be tested is ground and polished, and then cleaned and dried to obtain a polished sample;

[0032] 2. Electrochemical polishing treatment:

[0033] Place the polished sample in the polishing solution, and perform electrochemical polishing for 30s to 60s under the condition of a current of 0.2A to 5A to obtain an electrochemically polished sample;

[0034] The polishing liquid is mixed by methanol, n-butanol and perchloric acid; the volume ratio of the methanol and perchloric acid is (10~15):1; the volume of the n-butanol and perchloric acid The ratio is (5~9):1;

[0035] 3. S...

specific Embodiment approach 2

[0050] Specific embodiment two: the difference between this embodiment and specific embodiment one or two is that the grinding and polishing described in step one is specifically to adopt 200#, 400# and 1000# metallographic sandpaper in turn to measure the cross-section of the material Grind and polish. Others are the same as in the first or second embodiment.

specific Embodiment approach 3

[0051] Specific embodiment three: the difference between this embodiment and one of specific embodiments one or two is that the cleaning and drying described in step one are specifically cleaned with acetone, absolute ethanol and deionized water successively, and then heated at a temperature of Dry at 40°C to 80°C for 3h to 5h. Others are the same as in the first or second embodiment.

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Abstract

The invention discloses a method for processing a metal-based hard coating transmission electron microscope in-situ mechanical sample by a focused ion beam, and relates to a manufacturing method of atransmission electron microscope in-situ mechanical sample. The objective of the invention is to solve problems that an existing common transmission electron microscope in-situ mechanical test systemcannot realize optimal diffraction analysis conditions and cannot obtain an optimal diffraction result; and a common transmission electron microscope sample manufacturing technology cannot accuratelyanalyze deformation and fracture problems of a metal-based hard coating material in an in-situ mechanical test process in a transmission electron microscope in-situ mechanical test system. The methodcomprises the steps of 1, pretreatment; 2, electrochemical polishing treatment; 3, scanning electron microscope observation; 4, focused ion beam processing; and 5, copper bracket processing. And the method for processing the metal-based hard coating transmission electron microscope in-situ mechanical sample by using the focused ion beam is completed.

Description

technical field [0001] The invention relates to a preparation method of an in-situ mechanical sample for a transmission electron microscope. Background technique [0002] The high spatial resolution of the transmission electron microscope can accurately analyze the microstructure of materials from the micro-scale direction. In addition, the characterization of mechanical properties of materials has attracted more and more attention from researchers, especially the relationship between the microstructure and mechanical properties of materials under stress at the microscopic scale. In order to obtain high-quality transmission analysis results, it is necessary to rotate the sample axially and radially to adjust the direction of the crystal zone axis of the analyzed region so that it is parallel to the incident direction of the electron beam. However, the currently commonly used in-situ mechanical testing system for transmission electron microscopy uses a single-tilt sample rod...

Claims

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Application Information

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IPC IPC(8): G01N23/20008G01N23/20058G01N1/32G01N1/34G01N1/44
CPCG01N1/32G01N1/34G01N1/44G01N23/20008G01N23/20058
Inventor 魏大庆郭舒杜青邹永纯张宝友来忠红
Owner HARBIN INST OF TECH
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