Three-dimensional gallium nitride-based exhalation type gas sensor and preparation method thereof
A gas sensor, gallium nitride-based technology, applied in semiconductor/solid-state device manufacturing, semiconductor devices, semiconductor/solid-state device components, etc., can solve the problems of complex detection process, low repeatability of results, high price, etc., to achieve High reproducibility of results, good biocompatibility and environmental friendliness, cheap effect
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[0038] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention clearer, the present invention will be further described in detail in combination with the embodiments and accompanying drawings. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention. The technical solutions of the present invention will be described in detail below in conjunction with the embodiments and drawings, but the scope of protection is not limited thereto.
[0039] like Figure 1 to Figure 5 , is a flow chart of a preparation method of a three-dimensional gallium nitride-based exhalation gas sensor, the preparation method is:
[0040] 1) After the sapphire substrate GaN-based epitaxial wafer is processed by RCA standard cleaning method, the metal Ni layer 4 with a thickness of about 50 nm is evaporated by vacuum electron beam as a mask layer ...
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