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Arc electron source enhanced glow discharge heating process applied to PVD film coating

A glow discharge and heating process technology, which is applied in metal material coating process, sputtering plating, ion implantation plating, etc., can solve the problem of high cost, high maintenance requirements, preparation of hot arc source and hollow cathode arc source Technical complexity and other issues, to achieve the effect of temperature control

Active Publication Date: 2020-04-28
DONGGUAN HUICHENG VACUUM TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This method can avoid secondary pollution of the workpiece by the above-mentioned residual coating, but the preparation technology of the hot arc source and the hollow cathode arc source is relatively complicated, the requirements for use and maintenance are high, and the cost is also high, so it is difficult to popularize

Method used

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  • Arc electron source enhanced glow discharge heating process applied to PVD film coating
  • Arc electron source enhanced glow discharge heating process applied to PVD film coating
  • Arc electron source enhanced glow discharge heating process applied to PVD film coating

Examples

Experimental program
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Effect test

Embodiment 1

[0045]M2 high-speed steel heating process, using HC380 ion coating machine, using arc light electron source heating process, the principle is as follows figure 1 Specific steps are as follows

[0046] Include the following steps:

[0047] 1) Pretreatment: Polish the M2 high-speed steel sample of HRC62-65 after heat treatment, then ultrasonically clean it in alcohol for 10 minutes, and put it into the vacuum chamber of the coating machine after being fully dried;

[0048] 2) Vacuuming: the background vacuum of the vacuum chamber is 5.0×10 -3 Pa;

[0049] 3) Heating of the arc electron source: Introduce argon gas, adjust the air pressure to 0.6Pa, turn on the arc electron source: turn on the cathode arc source of the arc electron source, adjust the current to 60--80A, turn on the auxiliary anode of the arc electron source, and adjust to Current 20--40A; turn on the bias voltage and adjust the bias voltage to 100V, the duty cycle is 50%, and heat to 200°C; the heating time is ...

Embodiment 2

[0053] 304 stainless steel heating, using HC1912 ion coating machine, using arc light electron source heating process, the specific steps are as follows

[0054] Include the following steps:

[0055] 1) Pre-treatment: After polishing the 304 steel sample, perform ultrasonic cleaning in alcohol for 10 minutes, fully dry and put it into the vacuum chamber of the coating machine;

[0056] 2) Vacuuming: the background vacuum of the vacuum chamber is 3.0×10 -3 Pa;

[0057] 3) Cleaning of the arc electron source: Introduce argon gas, adjust the air pressure to 0.8Pa, turn on the arc electron source: turn on the cathode of the arc electron source, adjust the current to 80A, turn on the arc electron source anode, and adjust the current to 40A; then turn on the bias voltage adjustment Bias voltage to 300V, duty cycle 50%, heating to 150 degrees Celsius; holding time 30--60 minutes

[0058] 4) Turn off the arc electron source, turn off the gas, turn off the pulse bias, the heating pr...

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Abstract

The invention provides an arc electron source enhanced glow discharge heating process applied to PVD film coating. The arc electron source enhanced glow discharge heating process applied to PVD film coating comprises the steps that in a vacuum film coating chamber, a positive electrode of a pulsed bias voltage power supply is connected with a sealed container outer shell and is grounded, and a negative electrode of the pulsed bias voltage power supply is connected with a workpiece rotary frame; argon is introduced into the chamber and is maintained at 0.1-5 Pa, the pulsed bias voltage power supply is powered on to apply bias voltage between a workpiece and the chamber wall; a cathode arc source of an arc electron source is powered on to generate arc discharge plasma, an auxiliary anode ispowered on to apply a positive potential, a stream of electrons of the arc discharge plasma is guided into the chamber from an opening of a strip-shaped side seam beside a cathode arc front baffle ofthe arc electron source to initiate argon glow discharge to generate enhanced argon glow discharge plasma for heating; and the heating temperature is controlled by controlling the arc electron sourcecathode arc source, the current of the auxiliary anode, the bias voltage and the duty ratio. Through the arc electron source enhanced glow discharge heating process applied to PVD film coating, the workpiece is heated through arc discharge electron beam enhanced glow discharge plasma, the probability that products are polluted is reduced, and the yield of the products is increased.

Description

technical field [0001] The invention relates to a process for heating workpieces in PVD coating equipment, in particular to an arc electron source enhanced glow discharge heating process for PVD coating. Background technique [0002] Generally, PVD coating equipment is equipped with a heating unit. The commonly used heating unit is a resistance heating tube with a stainless steel jacket, which has a straight tube, a U-shaped tube or a coiled tube. A number of heat pipes are evenly distributed on the furnace wall or installed in the center of the furnace, and the radiant heat is used to heat the devices and workpieces in the space of the furnace, which is beneficial to desorb the adsorbed water and moisture, improve the vacuuming efficiency, and clean the surface of the workpiece. Improve coating quality. However, the surface of the stainless steel jacket heating tube placed in the furnace will also be coated with a coating during the coating stage. And after multiple coati...

Claims

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Application Information

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IPC IPC(8): C23C14/35C23C14/54
CPCC23C14/352C23C14/345C23C14/3442C23C14/3478C23C14/541
Inventor 李志荣李迎春冯晓庭罗永年
Owner DONGGUAN HUICHENG VACUUM TECH