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A reflective asymmetric metal grating polarizing beam splitter

A polarization beam splitter, metal grating technology, applied in diffraction grating, instruments, optics, etc., to achieve the effect of being suitable for mass production, simple parameter design, and reducing reflection efficiency

Active Publication Date: 2021-11-30
SHANGHAI JIAOTONG UNIV +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Most metal gratings studied so far have high reflective properties of TE, which will lead to high reflection of ambient light in devices using such polarizers

Method used

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  • A reflective asymmetric metal grating polarizing beam splitter
  • A reflective asymmetric metal grating polarizing beam splitter
  • A reflective asymmetric metal grating polarizing beam splitter

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0063] One-dimensional aluminum-tungsten grating. When the light is incident from the grating surface, the reflection of TE light is suppressed; when the light is incident from the substrate surface, the TE light is highly reflective. At the same time all have the same, high transmission polarization suppression ratio.

[0064] attached Figure 2 ~ Figure 4 A schematic diagram of the one-dimensional aluminum-tungsten grating structure and the reflection, transmission and absorption spectra in the visible range obtained by using the commercial software COMSOL, as well as the simulation results of the transmission polarization ratio are shown. The lower layer of the polarizing beam splitter is the first metal aluminum and the first medium (a material transparent to incident light or transparent to the working wavelength, such as air, pmma (polymethyl methacrylate), SiO2 (silicon dioxide), The first grating made of PC (polycarbonate), quartz, or PET (polyester resin), the perio...

Embodiment 2

[0068] see Figure 5 and Figure 6 , on the basis of Example 1, the thickness of the aluminum is increased to 150 nanometers, and at the same time, there is a side wall 6 of the first light-absorbing material with a thickness of 5 nanometers on the edge of the aluminum strip, and the side wall 6 of the first light-absorbing material is made of metal tungsten.

[0069] attached Figure 5 A schematic diagram of the composite grating structure is shown, and its structural parameters are the same as the one-dimensional aluminum-tungsten grating in Example 1, except that the thickness of the aluminum layer grating is increased to 150 nanometers, and the aluminum strips have 5 nanometer tungsten sidewalls.

[0070] attached Figure 6 The results of a simulated embodiment using the commercial software COMSOL are shown, with light incident from a grating facet. The simulation results show that the increase of the thickness of the aluminum layer has little effect on the reflection a...

Embodiment 3

[0072] see Figure 7 and Figure 8 , one-dimensional aluminum-boron carbide grating, the light is incident from the grating surface, the reflection of TE light is suppressed, and it has a high transmission polarization suppression ratio.

[0073] attached Figure 7 A schematic diagram showing the structure of a one-dimensional aluminum-boron carbide grating. The lower layer of the polarizing beam splitter is the first grating composed of the first metal aluminum and the first medium (air, pmma or SiO2). The period direction of the grating is along the x-axis, and the aluminum The lines extend along the y-axis direction with a period of P1 = 100 nanometers, the width of the metal aluminum lines is half of the period, ie w1 = 50 nanometers, and the aluminum thickness h1 = 120 nanometers. The first material above the aluminum is boron carbide with a thickness h2 = 60 nm.

[0074] Figure 8The reflection, transmission and absorption spectra in the visible range obtained by usi...

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Abstract

The invention discloses an asymmetric reflection metal grating polarizing beam splitter, comprising a substrate, a first medium and a first metal to form a first grating, and a first light absorbing material is arranged on the upper surface or side surface of the first metal; A plurality of second materials are arranged at equal intervals along the upper surface of the first metal in the longitudinal direction to form a second grating, and the first light-absorbing material is closely arranged on the first metal at the interval between two adjacent second materials. surface; the second light-absorbing material is closely arranged on the upper surface and / or side surface of the second material; the thickness of the second material is greater than that of the first light-absorbing material; in the space where the adjacent second material is higher than the first light-absorbing material Fill the second medium. The beam splitter has the characteristics of high polarization contrast, high transmission efficiency, low reflection on one side and high reflection on the other side. The optical efficiency of the display can be improved.

Description

technical field [0001] The invention relates to the technical field of polarization beam splitters, in particular to a metal grating polarization beam splitter with asymmetric reflection. Background technique [0002] Polarized light is widely used in modern optical technologies and applications, such as optical communication, optical storage, optical sensing and display, etc. The polarizing beam splitter can split the incident unpolarized light into two beams whose polarization directions are perpendicular to each other. [0003] With the current people's requirements for high efficiency, miniaturization and integration of optical devices, and the development of micro-nano processing technology, sub-wavelength gratings with excellent polarization characteristics have received extensive attention and research. It has small size, easy integration, and Flexible design features. [0004] From the material point of view, sub-wavelength gratings include dielectric gratings and ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B27/28G02B5/18
CPCG02B27/283G02B5/18G02B5/3058G02B5/1861
Inventor 叶志成郑君郭宵
Owner SHANGHAI JIAOTONG UNIV
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