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Manufacturing method of anode target, anode target, X-ray source and X-ray imaging system

A production method and anode target technology, applied in the field of X-rays, can solve the problems of long production cycle, high technical difficulty, low processing precision, etc., and achieve the effect of reducing production difficulty and solving production difficulties

Active Publication Date: 2020-07-03
SHENZHEN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004]However, the line width of the pattern produced by the above-mentioned first mechanical precision machining method can only reach 10 microns at least, and the machining accuracy is not high, so it is only suitable for coherence requirements A large periodic array X-ray light source that is not too high; the line width of the above-mentioned second method can reach 1 micron, but its processing technology is complicated, the technical difficulty is high, the production cycle is long, the cost is high, and the line edge uniformity needs to be improved , and not suitable for mass production

Method used

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  • Manufacturing method of anode target, anode target, X-ray source and X-ray imaging system
  • Manufacturing method of anode target, anode target, X-ray source and X-ray imaging system
  • Manufacturing method of anode target, anode target, X-ray source and X-ray imaging system

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Embodiment 1

[0038] Such as figure 1 As shown, Embodiment 1 of the present invention provides a method for manufacturing an anode target, and the method for manufacturing an anode target includes:

[0039] S110, forming periodically arranged first trenches on the substrate.

[0040] In this embodiment, the material of the substrate can be made of a high-hardness material such as diamond. Preferably, the processing method for forming a plurality of first grooves in a periodic arrangement on the substrate includes plasma etching technology, precision mechanical cutting One of the technology or femtosecond laser processing technology.

[0041] Specifically, the periodically arranged first grooves include: grooves arranged in zigzag, zigzag or S shape; or a plurality of grooves arranged in parallel and at intervals. Wherein, the grooves arranged in zigzag, zigzag or S shape include: a plurality of first sub-grooves arranged in parallel along the first direction, a plurality of second sub-gro...

Embodiment 2

[0057] Such as Figure 8 As shown, Embodiment 2 of the present invention provides an anode target, which is manufactured using the method for manufacturing an anode target provided in Embodiment 1 of the present invention.

[0058] In one embodiment, the anode target includes a substrate 801 , a first groove 802 , and a metal tungsten wire 803 .

[0059] Specifically, the material of the substrate 801 can be made of a high-hardness material such as diamond. Preferably, the processing method for forming a plurality of first grooves 802 in a periodic arrangement on the substrate 801 includes plasma etching technology, precision mechanical One of cutting technology or femtosecond laser processing technology.

[0060] Specifically, the periodically arranged first grooves 802 include: grooves arranged in zigzag, zigzag or S shape, such as image 3 and Figure 4 shown; or multiple grooves arranged in parallel at intervals, such as figure 2 shown. Wherein, the grooves arranged ...

Embodiment 3

[0065] Such as Figure 9 As shown, Embodiment 3 of the present invention provides an X-ray source, which includes a cathode 905 , a high-voltage power supply 906 , a tube shell 907 , an anode 908 and a transmission window 910 .

[0066] In this embodiment, the anode 908 includes an anode substrate 901, an anode target 902 and an anode cap 909, the anode target 902 adopts the anode target provided in Embodiment 2 of the present invention, and the cathode 905 includes a cathode cover 911, a cathode filament lead 903 and a cathode filament 912 , the high voltage power supply 906 is electrically connected to the cathode 905 and the anode target 902 respectively, the cathode 905 and the anode 908 are sealed in a high vacuum tube shell 907 , and the transmission window 910 is set outside the anode 908 .

[0067] When using the X-ray source, turn on the high-voltage power supply 906, make the cathode filament 912 of the cathode 905 emit electrons through the cathode filament lead 903...

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Abstract

The embodiment of the invention discloses a manufacturing method of an anode target, the anode target, an X-ray source and an X-ray imaging system. The manufacturing method of the anode target comprises the following steps: forming first grooves which are periodically arranged on a substrate; and fixing metal tungsten wires matched with the openings of the first grooves in the first grooves to form anode targets corresponding to the groove patterns. According to the embodiment of the invention, the manufacturing difficulty of the X-ray source is reduced so as to be suitable for batch production.

Description

technical field [0001] Embodiments of the present invention relate to X-ray technology, and in particular to a method for manufacturing an anode target, an anode target, an X-ray source, and an X-ray imaging system. Background technique [0002] X-ray grating imaging technology can simultaneously acquire X-ray absorption images, scattering images and phase contrast images of the target object, which has very important applications in the fields of medicine, life science, material science and industrial non-destructive detection. An X-ray source with a periodic structure anode can generate periodic structure X-rays. This light source plays a pivotal role in X-ray grating imaging systems such as X-ray grating interference imaging and X-ray grating non-interference imaging. [0003] Reflective X-ray tubes are usually used as the X-ray source of the X-ray imaging system, in which the anode target with periodic microstructure is the core of the X-ray source, that is, a periodic m...

Claims

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Application Information

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IPC IPC(8): H01J9/02H01J35/08G01N23/041G01N23/083G01N23/20008
CPCH01J9/02H01J35/08G01N23/041G01N23/083G01N23/20008
Inventor 宗方轲金川杨君
Owner SHENZHEN UNIV
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