Amorphous silicon/crystalline silicon heterojunction solar cell and preparation method thereof

A solar cell and amorphous silicon technology, which is applied in circuits, photovoltaic power generation, electrical components, etc., can solve the problems affecting the service life, economic benefits, and attenuation of amorphous silicon/crystalline silicon heterojunction solar cells, so as to improve the photovoltaic power generation. Conversion efficiency, improved stability, optimized effect of anti-reflection effect

Pending Publication Date: 2020-07-21
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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  • Application Information

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Problems solved by technology

[0003] Amorphous silicon/crystalline silicon heterojunction solar cell is a high-efficiency solar cell, referred to as HITR (Heterojunctionwith Intrinsic Thin-layer) or SHJ (Silicon Hetero Junction), the latter is mostly used in China, howe

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  • Amorphous silicon/crystalline silicon heterojunction solar cell and preparation method thereof
  • Amorphous silicon/crystalline silicon heterojunction solar cell and preparation method thereof
  • Amorphous silicon/crystalline silicon heterojunction solar cell and preparation method thereof

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[0059] There are many existing methods for preparing the transparent conductive oxide film 105, and preparing the transparent conductive oxide film 105 with low temperature and low damage is the key to obtain the high-efficiency amorphous silicon / crystalline silicon heterojunction solar cell . At present, magnetron sputtering (Sputtering) coating technology and reactive plasma deposition (RPD) technology are two alternative technologies for commercial preparation of the transparent conductive oxide film 105. As mentioned above, since the transparent conductive oxide film 105 serves as both a conductive layer and an anti-reflection layer, it is required to cover the surface of the amorphous silicon as much as possible in terms of structural design, so as to give full play to its conductivity and The dual function of anti-reflection. However, since the N-type monocrystalline silicon wafer 101 is relatively thin (100 μm ~ 200 μm), the transparent conductive oxide film 105 is easi...

Example Embodiment

[0065] Example one

[0066] Such as figure 2 , The present invention provides a method for preparing an amorphous silicon / crystalline silicon heterojunction solar cell, which includes the following steps:

[0067] Preparing an amorphous silicon / crystalline silicon heterojunction structure, wherein the upper surface and the lower surface of the amorphous silicon / crystalline silicon heterojunction structure respectively include a central area and an edge area surrounding the central area;

[0068] A transparent conductive oxide film is prepared, the transparent conductive oxide film covers the central region of the amorphous silicon / crystalline silicon heterojunction structure, and the transparent conductive oxide film is at least exposed in the amorphous silicon / The edge region on one of the upper surface and the lower surface of the crystalline silicon heterojunction structure;

[0069] Forming a metal electrode on the transparent conductive oxide film;

[0070] A cover film is forme...

Example Embodiment

[0088] Example two

[0089] Figure 6a~Figure 6b , The present invention also provides an amorphous silicon / crystalline silicon heterojunction solar cell, the amorphous silicon / crystalline silicon heterojunction solar cell includes:

[0090] Amorphous silicon / crystalline silicon heterojunction structure 100, the upper surface and lower surface of the amorphous silicon / crystalline silicon heterojunction structure 100 respectively include a central area A and an edge area B surrounding the central area A;

[0091] A transparent conductive oxide film 200, the transparent conductive oxide film 200 covers the central area A of the amorphous silicon / crystalline silicon heterojunction structure 100, and the transparent conductive oxide film 200 is at least exposed in the The edge region B on one of the upper surface and the lower surface of the amorphous silicon / crystalline silicon heterojunction structure 100;

[0092] The metal electrode 300 is located on the transparent conductive oxide f...

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Abstract

The invention provides an amorphous silicon/crystalline silicon heterojunction solar cell and a preparation method thereof, and the preparation method comprises the steps: preparing an amorphous silicon/crystalline silicon heterojunction structure, and enabling the upper surface and the lower surface of the amorphous silicon/crystalline silicon heterojunction structure to respectively comprise a central region and an edge region surrounding the central region; preparing a transparent conductive oxide film to cover the central region, and at least exposing an edge region of one of the upper surface and the lower surface of the amorphous silicon/crystalline silicon heterojunction structure; forming a metal electrode; and forming a covering film, wherein the covering film at least covers theexposed edge region. According to the invention, the chemical inertness and optical refractive index of silicon nitride, silicon oxide and silicon oxynitride are controllable; the stability of the amorphous silicon/crystalline silicon heterojunction solar cell is maximized, and the antireflection effect is optimized, so that the dual purposes of improving the stability and photoelectric conversionefficiency of the amorphous silicon/crystalline silicon heterojunction solar cell are achieved, and the amorphous silicon/crystalline silicon heterojunction solar cell has the advantages of low costand high stability.

Description

technical field [0001] The invention belongs to the field of amorphous silicon / crystalline silicon heterojunction solar cells, and relates to an amorphous silicon / crystalline silicon heterojunction solar cell and a preparation method. Background technique [0002] Solar cell power generation has the characteristics of small regional differences, huge reserves, safety, no pollution, and inexhaustible resources. It has become the main force of new energy and renewable energy technologies in the 21st century. There are many types of solar cells. At present, silicon-based solar cells are the mainstream, including crystalline silicon solar cells and thin-film silicon solar cells. The development direction of solar cells mainly focuses on improving efficiency, increasing service life and reducing cost. Improving service life and photoelectric conversion efficiency can not only reduce the production cost per unit of power generation, but also reduce the cost of installation and lan...

Claims

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Application Information

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IPC IPC(8): H01L31/20H01L31/0747H01L31/0224H01L31/0216
CPCH01L31/02168H01L31/022466H01L31/0747H01L31/202H01L31/208Y02E10/50Y02P70/50
Inventor 石建华孟凡英刘正新
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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