A Method for Improving the Laser Damage Resistance of Optical Thin Film Components
An optical film and anti-laser technology, which is applied in optical components, optics, optical instrument testing, etc., to achieve the effect of improving the bonding force, simple implementation, and improving the ability of components to resist laser damage
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[0032] The present invention will be described in further detail below in combination with specific embodiments.
[0033] Based on laser-induced plasma, the present invention provides a method for improving the ability of optical thin film components to resist laser damage, which specifically includes the following steps:
[0034] (1) Plating a batch of optical thin film elements as samples, and spraying and ultrasonic cleaning;
[0035] (2) Obtain the functional damage threshold of the optical thin film element; the functional damage threshold is defined according to the standard definition of component functional damage in the MEL01-013-0D small-caliber optical element test standard, that is, it does not appear: within 1cm 2 There are more than 10 damage pits in the area, and the damage pits are larger than 100 μm. The maximum energy of any damage pits in the subsequent growth of the laser is the functional damage threshold of the sample.
[0036] The specific method is:
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