Low-sensitivity coarse wavelength division multiplexing optical filter and manufacturing method thereof

Abstract

The invention discloses a low-sensitivity coarse wavelength division multiplexing optical filter. The low-sensitivity coarse wavelength division multiplexing optical filter comprises a glass substrate, a wavelength division multiplexing film layer and an antireflection film layer. The wavelength division multiplexing film layer is arranged on one side of the glass substrate, and comprises fifty Ta2O5 film layers and fifty SiO2 film layers, and the Ta2O5 film layers and the SiO2 film layers are alternately arranged in an overlaid mode. The antireflection film layer is arranged on the other sideof the glass substrate, and comprises two Ta2O5 film layers and two SiO2 film layers, and the Ta2O5 film layers and the SiO2 film layers are alternately arranged in an overlaid mode. The invention further discloses a manufacturing method of the low-sensitivity coarse wavelength division multiplexing optical filter. The manufacturing method comprises the following steps of polishing the substrate;cleaning the substrate; clamping the substrate; coating the substrate with films; and conducting upper disc cutting. In this way, the number of the film layers of the optical filter can be reduced, the thicknesses of the film layers of the optical filter are reduced, the consumption of wafer materials is reduced, and the optical processing cost is reduced.

Description

technical field [0001] The invention relates to the technical field of optical filters, in particular to a low-sensitivity coarse wavelength division multiplexing optical filter and a manufacturing method thereof. Background technique [0002] CWDM is a low-cost WDM transmission technology for the access layer of the metropolitan area network. In principle, CWDM is to use an optical multiplexer to multiplex optical signals of different wavelengths into a single optical fiber for transmission. signal, connect to the corresponding receiving equipment. [0003] A CWDM filter is an interference filter formed by alternately stacking two or more different coating materials on a glass substrate under vacuum conditions. At present, the traditional coating industry mainly uses high-end ion sputtering coating equipment and magnetron sputtering Spray coating equipment, using glass wafer (wafer) coating, after wafer coating, cutting, thinning, flip coating, loading, cutting, bottom in...

AI Technical Summary

Problems solved by technology

The thickness of the traditional CWDM optical filter film increases the amount of wafer material used, and the production of traditional CWDM optical filter relies on high-end and expensive laser monitoring coating equipment (such as Veeco coating machine), the production process is complicated, and the optical Processing costs lead to high costs

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