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Low-sensitivity coarse wavelength division multiplexing optical filter and manufacturing method thereof

A technology of wavelength division multiplexing and manufacturing method, which is applied in the field of optical filters, can solve the problems of increasing the amount of wafer material used, increasing the cost of optical processing, and the thickness of the optical filter film, so as to reduce the design sensitivity and reduce the optical processing. Cost and effect of fewer film layers

Pending Publication Date: 2020-07-24
苏州东辉光学有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The thickness of the traditional CWDM optical filter film increases the amount of wafer material used, and the production of traditional CWDM optical filter relies on high-end and expensive laser monitoring coating equipment (such as Veeco coating machine), the production process is complicated, and the optical Processing costs lead to high costs

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  • Low-sensitivity coarse wavelength division multiplexing optical filter and manufacturing method thereof
  • Low-sensitivity coarse wavelength division multiplexing optical filter and manufacturing method thereof

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Embodiment Construction

[0029] The preferred embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings, so that the advantages and features of the present invention can be more easily understood by those skilled in the art, so as to define the protection scope of the present invention more clearly.

[0030] Referring to the accompanying drawings, a low-sensitivity coarse wavelength division multiplexing filter includes: a glass substrate 1 , a wavelength division multiplexing film layer 2 and an anti-reflection film layer 3 .

[0031] The glass substrate is a pre-processed double-sided polished glass sheet with a size between 11mm*11mm and 30mm*30mm and a thickness between 0.3mm and 1.2mm.

[0032] The wavelength division multiplexing film layer is arranged on one side of the glass substrate, and the optical filter has a wavelength division multiplexing function through the wavelength division multiplexing film layer. The wavelength division ...

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Abstract

The invention discloses a low-sensitivity coarse wavelength division multiplexing optical filter. The low-sensitivity coarse wavelength division multiplexing optical filter comprises a glass substrate, a wavelength division multiplexing film layer and an antireflection film layer. The wavelength division multiplexing film layer is arranged on one side of the glass substrate, and comprises fifty Ta2O5 film layers and fifty SiO2 film layers, and the Ta2O5 film layers and the SiO2 film layers are alternately arranged in an overlaid mode. The antireflection film layer is arranged on the other sideof the glass substrate, and comprises two Ta2O5 film layers and two SiO2 film layers, and the Ta2O5 film layers and the SiO2 film layers are alternately arranged in an overlaid mode. The invention further discloses a manufacturing method of the low-sensitivity coarse wavelength division multiplexing optical filter. The manufacturing method comprises the following steps of polishing the substrate;cleaning the substrate; clamping the substrate; coating the substrate with films; and conducting upper disc cutting. In this way, the number of the film layers of the optical filter can be reduced, the thicknesses of the film layers of the optical filter are reduced, the consumption of wafer materials is reduced, and the optical processing cost is reduced.

Description

technical field [0001] The invention relates to the technical field of optical filters, in particular to a low-sensitivity coarse wavelength division multiplexing optical filter and a manufacturing method thereof. Background technique [0002] CWDM is a low-cost WDM transmission technology for the access layer of the metropolitan area network. In principle, CWDM is to use an optical multiplexer to multiplex optical signals of different wavelengths into a single optical fiber for transmission. signal, connect to the corresponding receiving equipment. [0003] A CWDM filter is an interference filter formed by alternately stacking two or more different coating materials on a glass substrate under vacuum conditions. At present, the traditional coating industry mainly uses high-end ion sputtering coating equipment and magnetron sputtering Spray coating equipment, using glass wafer (wafer) coating, after wafer coating, cutting, thinning, flip coating, loading, cutting, bottom in...

Claims

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Application Information

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IPC IPC(8): G02B5/28G02B6/293
CPCG02B5/285G02B6/29361
Inventor 向久成秦明海
Owner 苏州东辉光学有限公司
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