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Cleaning method of black silicon texturing sheet

A black silicon and velvet technology, applied in the field of solar cell manufacturing, can solve the problems of increasing suede reflectivity, low photoelectric conversion efficiency, poor suede stability, etc. Effect

Active Publication Date: 2020-08-18
YINGLI ENERGY CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Aiming at the problems of easy increase of reflectivity of the suede surface, poor stability of the suede surface and low photoelectric conversion efficiency existing in the cleaning method of the black silicon texturing process, the present invention provides a cleaning method of the black silicon texturing sheet

Method used

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  • Cleaning method of black silicon texturing sheet

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Effect test

Embodiment 1

[0022] During the fabrication of solar cells, the black silicon textured sheets induced by metal ions are cleaned as follows:

[0023] (1) Place the black silicon textured sheet after demetallization in the metal ion-induced black silicon texturing process at a temperature of 20°C and an ozone concentration of 0.4g / m 3 In the ozone aqueous solution, ultrasonic cleaning treatment for 100s;

[0024] (2) Soak the black silicon textured sheet treated in step (1) with pure water at a temperature of 20° C. for 2 minutes;

[0025] (3) putting the black silicon textured sheet cleaned with pure water in step (2) into a mixed solution of hydrofluoric acid and ammonium fluoride at a temperature of 20° C. to soak for 2 minutes, the mixed solution having a mass concentration of 40% The hydrofluoric acid solution and the ammonium fluoride solution with a mass concentration of 37% are mixed in a volume ratio of 2:1;

[0026] (4) Soak the black silicon textured sheet treated in step (3) wit...

Embodiment 2

[0031] During the fabrication of solar cells, the black silicon textured sheets induced by metal ions are cleaned as follows:

[0032] (1) Place the black silicon textured sheet after demetallization in the metal ion-induced black silicon texturing process at a temperature of 40°C and an ozone concentration of 0.5g / m 3 In the ozone aqueous solution, ultrasonic cleaning treatment for 200s;

[0033] (2) Soak the black silicon textured sheet treated in step (1) with pure water at a temperature of 22°C for 5 minutes;

[0034] (3) putting the black silicon textured sheet cleaned with pure water in step (2) into a mixed solution of hydrofluoric acid and ammonium fluoride at a temperature of 40° C. to soak for 4 minutes, the mixed solution having a mass concentration of 45% The hydrofluoric acid solution and the sodium fluoride solution with a mass concentration of 38% are mixed in a volume ratio of 5:1;

[0035] (4) Soak the black silicon textured sheet treated in step (3) with pu...

Embodiment 3

[0040] During the fabrication of solar cells, the black silicon textured sheets induced by metal ions are cleaned as follows:

[0041] (1) Place the black silicon textured sheet after demetallization in the process of metal ion-induced black silicon texture at a temperature of 55°C and an ozone concentration of 0.6g / m 3 In the ozone aqueous solution, ultrasonic cleaning treatment for 300s;

[0042] (2) Soak the black silicon textured sheet treated in step (1) with pure water at a temperature of 25° C. for 8 minutes;

[0043] (3) putting the black silicon textured sheet cleaned with pure water in step (2) into a mixed solution of hydrofluoric acid and ammonium fluoride at a temperature of 50° C. for 6 minutes, the mixed solution having a mass concentration of 49% The hydrofluoric acid solution and the potassium fluoride solution with a mass concentration of 40% are mixed in a volume ratio of 10:1;

[0044] (4) Soak the black silicon textured sheet treated in step (3) with pur...

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Abstract

The invention relates to the technical field of solar cell manufacturing, and particularly discloses a cleaning method of a black silicon texturing sheet. The black silicon texturing sheet is obtainedby a metal ion induced black silicon texturing technology, and the cleaning method comprises the steps of using an ozone aqueous solution, pure water, a mixed acid solution, pure water, an ozone aqueous solution and pure water sequentially for soaking a silicon wafer, and then drying the silicon wafer, wherein the mixed acid solution is formed by mixing a hydrofluoric acid solution with the massconcentration of 40-49% and a fluorate solution with the mass concentration of 37-40% according to the volume ratio of (2-10): 1. According to the cleaning method, the light reflectivity of the textured surface can be controlled, the photoelectric conversion efficiency is improved, finally, a layer of extremely thin silicon oxide film can be formed on the surface of the micro-trimmed textured surface, and a remarkable cleaning effect on the surface of the silicon wafer is achieved.

Description

technical field [0001] The invention relates to the technical field of solar cell manufacturing, in particular to a method for cleaning black silicon textured sheets. Background technique [0002] Black silicon texturing (metal-induced catalytic etching) is a method that has emerged in recent years to form a good submicron-scale rough surface on diamond wire silicon wafers, which can increase the light absorption rate of the silicon wafer surface, thereby improving the performance of solar cells. photoelectric conversion efficiency. Texturing is the first process step in the production of solar cells. Texturing is to create irregular corrosion pits on the surface of silicon wafers, so that more light can enter the silicon wafers when it is incident. [0003] After the silicon wafer cutting technology changed from mortar cutting to diamond wire cutting, the thickness of the damaged layer on the surface of the silicon wafer was greatly reduced, the amount of wafers was increa...

Claims

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Application Information

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IPC IPC(8): H01L31/18H01L21/02H01L21/67C11D7/08
CPCH01L31/1804H01L21/02057H01L21/67276C11D7/08Y02E10/547Y02P70/50
Inventor 徐卓王红芳李倩张春旭李锋史金超尚琪陈志军
Owner YINGLI ENERGY CHINA