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A kind of preparation method of uniform temperature graphite tube for graphite furnace

A technology of graphite tubes and graphite furnaces, applied in chemical instruments and methods, carbon compounds, inorganic chemistry, etc., can solve the problem of incompatibility between furnace purity and temperature uniformity, inability to use infrared radiation layers, instability of silicon carbide, etc. problem, to achieve the effect of controllable coating thickness, tight bonding force and low cost

Active Publication Date: 2021-11-30
ZHEJIANG UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, in the prior art, ultra-high sintering temperature, furnace purity and temperature uniformity cannot be achieved at the same time
At high temperatures, silicon carbide is unstable and cannot be used as an infrared radiation layer; therefore, a high-radiation coating that can withstand high temperatures is required

Method used

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  • A kind of preparation method of uniform temperature graphite tube for graphite furnace
  • A kind of preparation method of uniform temperature graphite tube for graphite furnace
  • A kind of preparation method of uniform temperature graphite tube for graphite furnace

Examples

Experimental program
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Effect test

Embodiment 1

[0020] A preparation method of a uniform temperature graphite tube, the method comprising:

[0021] (1) Dissolve 1 g of potassium permanganate and 2 g of manganese dioxide in 60 mL of concentrated sulfuric acid with a mass fraction of 98%, to obtain a strongly acidic oxidation solution.

[0022] Mix large-size graphene oxide and small-size graphene oxide in the range of 10-100um in proportion to prepare a graphene oxide solution, so that the size distribution coefficient is above 0.6.

[0023] (2) Take a square groove with an inlet and outlet, and the strong acidic oxidation solution circulates from the inlet to the outlet at a flow rate of 0.1m / s. Submerge the graphite tube in the flowing strong acidic oxidation solution for 30 minutes.

[0024] (3) After cleaning with deionized water, the graphene oxide solution prepared in step 1 of 10ug / mL was sprayed on the inner surface to form a film, and the thickness of the film was less than 100nm.

[0025] (4) After drying, sinter ...

Embodiment 2

[0040] A method for preparing a nano-graphite coating on the inner surface of a graphite tube, the method comprising:

[0041] (1) Dissolve 1 g of hydrogen peroxide and 5 g of water in 600 mL of concentrated sulfuric acid with a mass fraction of 98%, to obtain a strongly acidic oxidation solution.

[0042] Mix large-size graphene oxide and small-size graphene oxide in the range of 10-100um in proportion to prepare a graphene oxide solution, so that the size distribution coefficient is above 0.6.

[0043] (2) Take a square groove with an inlet and outlet, and the strong acidic oxidation solution circulates from the inlet to the outlet at a flow rate of 0.1m / s. Immerse the surface of the graphite tube in the flowing strong acidic oxidation solution for 10 minutes.

[0044] (3) After cleaning with deionized water, the graphene oxide solution prepared in step 1 of 1 mg / mL was sprayed on the surface to form a film, and the thickness of the film was less than 100 nm.

[0045] (4) Aft...

Embodiment 3

[0057] A method for preparing a nano-graphite coating on the inner surface of a graphite tube, the method comprising:

[0058] (1) Dissolve 1 g of potassium ferrate and 5 g of iron oxide in 100 mL of concentrated sulfuric acid with a mass fraction of 98% to obtain a strongly acidic oxidation solution.

[0059] Mix large-size graphene oxide and small-size graphene oxide in the range of 10-100um in proportion to prepare a graphene oxide solution, so that the size distribution coefficient is above 0.6.

[0060] (2) Take a square groove with an inlet and outlet, and the strong acidic oxidation solution circulates from the inlet to the outlet at a flow rate of 0.1m / s. Immerse the inner surface of the graphite tube in the flowing strong acidic oxidation solution for 20 minutes.

[0061] (3) After cleaning with deionized water, the graphene oxide solution prepared in step 1 of 0.5 mg / mL was sprayed on the surface to form a film, and the thickness of the film was less than 100 nm.

...

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Abstract

The invention discloses a uniform-temperature graphite tube used in a graphite furnace, which belongs to the field of new materials. The inner wall of the graphite tube is provided with a coating, and the coating is obtained by spraying twice. The graphite tube sprayed with a functional coating has the technical effect of preventing escape and ensuring uniform temperature in the furnace, and solves the problem in the prior art that the high-temperature protective coating is easy to volatilize and cause pollution.

Description

technical field [0001] The invention belongs to the field of new materials, and in particular relates to a preparation method of a uniform temperature graphite tube used in a graphite furnace. Background technique [0002] The production and research of semiconductor materials, devices, and integrated circuits have become an important part of the electronics industry. Components and integrated circuits made of semiconductor materials are important basic products of the electronics industry, and have great uses in daily life, military and aerospace fields. [0003] The growth of semiconductor materials requires a high-purity high-temperature furnace as a growth container to ensure the high purity of the gas molecules inside the container during the high-temperature process. Currently available thermal coatings mainly include silicon carbide coatings and thermally deposited graphite coatings. The uniformity of the temperature of the furnace body has a great influence on the ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C01B32/205
CPCC01B32/205
Inventor 韩金马佳奇冯袆平仇涛磊钟明强
Owner ZHEJIANG UNIV OF TECH