Flexible vibration sensor with piezoresistive effect and preparation method thereof

Abstract

The invention discloses a flexible vibration sensor with a piezoresistive effect, and belongs to the technical field of flexible functional electronic materials and novel sensors. The flexible vibration sensor comprises a sensitive material and a conductive electrode. The sensitive material comprises a carbon nanotube film and zinc oxide particles attached to the carbon nanotube film, the thickness of the carbon nanotube film is 50-80 [mu] m, the size of the zinc oxide particles is 200-500 nm, and the mass ratio of a carbon nanotube to zinc oxide is (12-15): 1. The sensitive material of the sensor comprises a carbon nanotube film and zinc oxide particles. The carbon nanotube film on the bottom layer has a three-dimensional conductive network structure, and object vibration caused by impactcauses surface vibration of the sensitive material to deform, so that the resistance of a three-dimensional conductive network of the carbon nanotube is changed; and moreover, zinc oxide has a piezoresistive effect, object vibration caused by impact can also cause resistance change of the zinc oxide layer, and the sensitivity of the vibration sensor is effectively enhanced.

Description

technical field [0001] The invention belongs to the technical field of flexible functional electronic materials and novel sensors, and in particular relates to a flexible vibration sensor with piezoresistive effect and ranging capability and a preparation method thereof. Background technique [0002] Mechanical sensors are sensors that convert mechanical signals into other detection signals, mainly including metal foil strain gauges, piezoelectric wafers (usually lead zirconate titanate), optical fibers, electromagnetic acoustic transducers and piezoelectric polymer sensors (such as polymer vinylidene fluoride and its copolymers). Among them, strain gauges and piezoelectric polymer film-type sensors only respond to low-frequency spectrum signals and have low sensitivity; piezoelectric wafers cannot be bent and stretched, cannot be used on curved or complex surfaces, and have large weight and volume; optical fiber-based sensors are brittle, and embedding optical fibers in st...

AI Technical Summary

Problems solved by technology

Among them, strain gauges and piezoelectric polymer film-type sensors only respond to low-frequency spectrum signals and have low sensitivity; piezoelectric wafers cannot be bent and stretched, cannot be used on curved or complex surfaces, and have large weight and volume; optical fiber-based sensors are brittle, and embedding optical fibers in structures such as laminated composites not only complicates the fabrication process but also reduces the local strength of the composite; polyvinylidene fluoride and its copolymers can achieve large-area coverage and fit well Curved surfaces, but typically have lower piezoelectric coefficients, resulting in lower sensitivity

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