Manufacturing method of ultra-wideband composite ferrite circulator

Abstract

The invention discloses a method for manufacturing a spliced ultra-wideband composite ferrite microstrip circulator with high yield, and the method comprises the following steps: 1, precisely polishing substrates: precisely polishing each substrate required by the spliced ultra-wideband composite ferrite microstrip circulator before use so as to control the thickness tolerance of the substrates within + / -5 [mu]m; 2, manufacturing a microstrip circuit: manufacturing a microstrip metal circuit pattern on each precisely polished substrate through a conventional thin film circuit process, and manufacturing a back grounding metal layer on the back surface of each substrate through a conventional thin film circuit process; 3, manufacturing eutectic solder on the back face; 4, cutting the substrate from the back surface; 5, carrying out the tight splicing eutectic welding; 6, performing microstrip electroplating in-situ communication: electroplating a metal layer on the microstrip metal circuit pattern, wherein the thickness of the metal layer is 4-6 [mu]m.

Description

technical field [0001] The invention belongs to the technical field of hybrid integrated circuits, and in particular relates to a manufacturing method of an ultra-wideband composite ferrite circulator. Background technique [0002] Electromagnetic suppression, electromagnetic interference and anti-interference play an increasingly prominent role in modern battlefields, requiring corresponding electronic equipment to have ultra-bandwidth and high-power performance. Ferrite-based microstrip circulators have good insertion loss performance, high power performance and large Bandwidth performance makes it the preferred component of active phased array radar for modern electronic equipment. [0003] Usually, to achieve ultra-wideband (above one octave) for ferrite microstrip circulators, it is necessary to adopt a composite ferrite structure with a gradual change in saturation magnetization gradient. Patent application 201911201129.8 discloses a simple and easy spliced ​​ultra-wid...

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Problems solved by technology

[0004] The above-mentioned traditional manufacturing methods have no problems in making low-frequency or narrow-band devices, but ultra-wideband composite ferrite microstrip circulators usually work on high-frequency and ultra-wide bands from a few GHz to more than ten GHz, and due to the phased array The reason is that good amplitude and phase consistency is usually required. Some problems that are usually negligible in the above-mentioned traditional manufacturing methods will affect the electrical performance and cannot be ignored.

For example: Since the solder sheet or solder paste is relatively thick (usually tens of microns), it may be squeezed into the splicing gap if it is accidentally soldered, and the electrical performance will deteriorate if it penetrates into the gap of tens of microns; On the broadband device, the microstrip connection is realized by bonding gold wires, gold ribbons and other metal laps, which requires very heavy debugging in the follow-up, and even the required performance cannot be debugged; Increased manufacturing complexity, on the other hand, due to the addition of a medium above the microstrip, the microstrip circuit is discontinuous, which easily leads to poor electrical performance

[0005] Therefore, although the ultra-broadband composite ferrite microstrip circulator of this splicing structure is much simpler and easier than the ultra-broadband composite ferrite microstrip circulator of the cylinder-annular nested structure, if the traditional conventional manufacturing method, in mass production, it will also face the problems of heavy follow-up debugging tasks, low yield and poor consistency

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