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Ferromagnetic resonance (FMR) electrical testing apparatus for spintronic devices

A technology of ferromagnetic resonance and components, which is applied in the direction of measurement by electron paramagnetic resonance, electronic circuit test, analysis by electron paramagnetic resonance, etc., can solve the problems that hinder the acceptance of FMR technology, cannot be widely used, time-consuming question

Inactive Publication Date: 2020-10-30
TAIWAN SEMICON MFG CO LTD
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

[0017] Because conventional FMR techniques are destructive, time-consuming, and limited to measuring larger structures with cross-sectional dimensions much greater than 1mm, these measurement methods have equated to hindering the adoption of FMR techniques as a characterization tool in the magnetic data storage industry. acceptance, and prevent widespread application of

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  • Ferromagnetic resonance (FMR) electrical testing apparatus for spintronic devices
  • Ferromagnetic resonance (FMR) electrical testing apparatus for spintronic devices
  • Ferromagnetic resonance (FMR) electrical testing apparatus for spintronic devices

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Embodiment Construction

[0042] The present disclosure is a scanning ferromagnetic resonance (FMR) system designed to measure magnetic properties of magnetic structures, including H K and α, while the diameter of the magnetic structure may be substantially less than 1 mm. Multiple test locations on the chip are measured in either RF transmission mode or RF reflection mode. The X-axis and Y-axis coordinates on the chip under test (WUT) are parallel to and above the plane of the wafer holder. The present disclosure also includes an FMR testing method for measuring magnetic properties of one or more magnetic films in an unpatterned chip or device structure. The terms "radio frequency" (RF) and "microwave" are used interchangeably.

[0043] In related U.S. Patent Application No. 15 / 463,074, an FMR measurement system has been disclosed that relies on a waveguide transmission line (WGTL) connected to the RF input and RF output connectors, And can be measured at multiple locations across the chip. Howeve...

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Abstract

A scanning ferromagnetic resonance (FMR) measurement system is disclosed with a radio frequency (RF) probe and one or two magnetic poles mounted on a holder plate and enable a perpendicular-to-plane or in-plane magnetic field, respectively, at test locations. While the RF probe tip contacts a magnetic film on a whole wafer under test (WUT), a plurality of microwave frequencies (fR) is sequentiallytransmitted through the probe tip. Simultaneously, a magnetic field (HR) is applied to the contacted region thereby causing a FMR condition in the magnetic film for each pair of (HR, fR) values. RF output signals are transmitted through or reflected from the magnetic film to a RF diode and converted to voltage signals which a controller uses to determine effective anisotropy field, linewidth, damping coefficient, and / or inhomogeneous broadening for a sub-mm area. The WUT is moved to preprogrammed locations to enable multiple FMR measurements at each test location.

Description

[0001] Related Patent Applications [0002] This application is related to Docket #HT16-012, Serial No. 15 / 463,074, filed 3 / 20 / 17; assigned to the common assignee, which is hereby incorporated by reference in its entirety. technical field [0003] Embodiments of the present invention relate to a system and method for measuring the magnetic properties of magnetic thin films and structures in regions with diameters as small as sub-millimeters, in particular, a magnetic component and an RF probe are set on a platform and installed on In the electrical probe station, fully automated ferromagnetic resonance testing of films and structures on the entire chip can be performed without cutting the chip in an engineering or manufacturing environment. Background technique [0004] Magnetic thin films and multilayer films play an important role in various types of magnetic storage elements, such as magnetic hard disk (magnetic hard disk, HDD) drives, magnetic random access memory (Magn...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N24/10G01R33/60G01R31/28
CPCG01N24/10G01R33/60G01R33/24G01N24/00
Inventor 真杰诺李松路克·汤马斯圣地牙哥·山诺·古山
Owner TAIWAN SEMICON MFG CO LTD