Graphene/TiN-Ag composite material and preparing method thereof

A composite material, graphene technology, applied in metal material coating process, ion implantation plating, coating and other directions, can solve the problem of strong dependence on excitation light source, and achieve excellent SERS performance, controllable thickness, and simple method. Effect

Inactive Publication Date: 2020-11-06
高祥贵
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In practical applications, users also found that only relying on the surface plasmon resonance properties of noble metal nanoparticles itself has a strong dependence on the excitation light source, so there are serious application limitations.

Method used

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  • Graphene/TiN-Ag composite material and preparing method thereof
  • Graphene/TiN-Ag composite material and preparing method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0032] A graphene / TiN-Ag composite material, including a two-dimensional structure array template formed on a silicon wafer by the arrangement of polylactic acid microspheres, alternately deposited TiN-Ag layers and graphene layers on the template, TiN-Ag The deposited thicknesses of the layers and graphene layers were 50 nm and 2 nm, respectively.

[0033] Wherein, the molar ratio of TiN and Ag in the TiN-Ag layer is 10:1.

[0034] step one:

[0035] (1) Get the silicon wafer and soak it in 1% sodium lauryl sulfate solution for 12 hours to make it have hydrophilic properties;

[0036] (2) Prepare the ethanol solution of polylactic acid microspheres, according to the mass volume ratio of polylactic acid microspheres and ethanol solution, it is 1g:0.5mL after mixing and ultrasonically so that it is dispersed evenly;

[0037] (3) Drop the above-mentioned solution of polylactic acid ethanol on a hydrophilic silicon chip, spread the liquid evenly, insert it into the water obliqu...

Embodiment 2

[0042] A graphene / TiN-Ag composite material, including a two-dimensional structure array template formed on a silicon wafer by the arrangement of polylactic acid microspheres, alternately deposited TiN-Ag layers and graphene layers on the template, TiN-Ag The deposited thicknesses of the A layer and the graphene layer are 60 nm and 4 nm, respectively.

[0043] Wherein, the molar ratio of TiN and Ag in the TiN-Ag layer is 10:1.2.

[0044] step one:

[0045] (1) Get the silicon wafer and soak it in 2% sodium lauryl sulfate solution for 12 hours to make it have hydrophilic properties;

[0046] (2) prepare the ethanol solution of polylactic acid microspheres, according to the mass volume ratio of polylactic acid microspheres and ethanol solution is 1:0.5 after mixing ultrasonic, make it disperse evenly;

[0047](3) Drop the above-mentioned solution of polylactic acid ethanol on a hydrophilic silicon chip, spread the liquid evenly, insert it into the water obliquely, and spread t...

Embodiment 3

[0052] A graphene / TiN-Ag composite material, including a two-dimensional structure array template formed on a silicon wafer by the arrangement of polylactic acid microspheres, alternately deposited TiN-Ag layers and graphene layers on the template, TiN-Ag The deposited thicknesses of the A layer and the graphene layer are 70 nm and 8 nm, respectively.

[0053] Wherein, the molar ratio of TiN and Ag in the TiN-Ag layer is 10:1.7.

[0054] step one:

[0055] (1) Get the silicon chip and soak it in 3% sodium lauryl sulfate solution for 12 hours to make it have hydrophilic properties;

[0056] (2) prepare the ethanol solution of polylactic acid microspheres, according to the mass volume ratio of polylactic acid microspheres and ethanol solution is 1:0.5 after mixing ultrasonic, make it disperse evenly;

[0057] (3) Drop the above-mentioned solution of polylactic acid ethanol on a hydrophilic silicon chip, spread the liquid evenly, insert it into the water obliquely, and spread t...

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Abstract

The invention discloses a graphene / TiN-Ag composite material. The graphene / TiN-Ag composite material comprises a two-dimensional structure array template which is formed on a silicon wafer and formedby arranging polylactic acid microspheres, a TiN-Ag layer and a graphene layer, wherein the TiN-Ag layer and the graphene layer are alternately deposited on the template. The steps for preparing the graphene / TiN-Ag composite material include that firstly, the polylactic acid microspheres are used for preparing a two-dimensional periodic structure array through a self-assembly technology, and a polylactic acid micro colloidal sphere template is obtained; secondly, TiN layer spin coating and Ag layer magnetron sputtering are conducted; and thirdly, electronic rotation plasma sputtering deposition of the graphene layer is conducted. By means of the graphene / TiN-Ag composite material, due to the compound effect of the graphene layer and the TiN-Ag layer, a substrate can achieve Raman enhancement under various excitation wavelengths, the dependency of the substrate on an excitation light source is overcome to a certain degree, and the Raman analytical application range is enlarged.

Description

technical field [0001] The invention belongs to the technical field of surface-enhanced Raman scattering spectroscopy (SERS) detection, and in particular relates to a graphene / TiN-Ag composite material and a preparation method thereof. Background technique [0002] Surface-enhanced Raman scattering (surface-enhanced Raman scattering, SERS) has been used in biomedicine, environmental monitoring, food safety and other fields due to its high detection sensitivity, fast analysis speed, no water interference, and non-destructive testing of samples. . The preparation of highly active SERS substrates is a key issue restricting the application of surface-enhanced Raman scattering technology. Traditional SERS substrates generally use precious metals such as gold, silver, copper, etc., but these substrate materials are costly, and the metal surface needs to be roughened to have high SERS activity, and rough substrates are mostly unstable and susceptible to other Substance interferen...

Claims

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Application Information

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IPC IPC(8): C23C14/20C23C14/06C23C14/02C23C14/35C23C14/46
CPCC23C14/024C23C14/0605C23C14/0617C23C14/20C23C14/35C23C14/46
Inventor 高祥贵
Owner 高祥贵
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