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Semiconductor micro-nano processing technology training system and its application based on VR and AR

A micro-nano processing and semiconductor technology, applied in the field of semiconductors, to avoid troubles and dangers, have a strong sense of interaction, and operate safely

Active Publication Date: 2022-05-17
SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, there is currently no VR / AR training platform and related technical courseware for semiconductor micro-nano processing combined with VR / AR technology.

Method used

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  • Semiconductor micro-nano processing technology training system and its application based on VR and AR
  • Semiconductor micro-nano processing technology training system and its application based on VR and AR
  • Semiconductor micro-nano processing technology training system and its application based on VR and AR

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0098] Embodiment 1 Wearing ultra-clean clothes and entering and exiting the ultra-clean room

[0099] Such as figure 2 As shown, the trainees put on the VR equipment, log in to the training system, enter the security protection module, and choose to enter and exit the clean room. Follow the system prompts to pass through the access control of the first dressing room, take off the jacket and put it in the wardrobe, and then enter the second dressing room. Wear ultra-clean clothes according to the animation example, and the sequence is: wear disposable gloves, disposable hair nets, disposable masks, ultra-clean clothes, ultra-clean caps, and ultra-clean shoes. After wearing, arrange the ultra-clean clothes in front of the mirror to ensure that they are dressed properly. Then follow the voice prompts to enter the air shower room, and leave the air shower room after air showering according to the regulations.

Embodiment 2

[0100] Embodiment 2 simulated fire drill

[0101] Such as image 3 As shown, the trainees put on the VR equipment, log in to the training system, enter the safety protection module, and select the fire drill. According to the system prompt, first observe the three-dimensional model of the clean room space and the escape route. After familiarizing yourself with the escape route, select the drill to begin. After the alarm sounds, quickly leave the clean room according to the escape route prompted by the system.

Embodiment 3

[0102] Embodiment 3 material observation

[0103] Such as Figure 4 As shown, the trainees put on the VR equipment, log in to the training system, enter the raw material module, and switch the scene to the material storage room. Find and open the substrate storage cabinet, take out the sample box, take out the virtual tweezers through the interactive button of the VR handle, and use the tweezers to pick up the four-inch single crystal silicon substrate from the sample box for observation. Move the four-inch monocrystalline silicon substrate to the center of the field of view, and its property parameters will be automatically displayed on the top of the substrate after one second, including: radius, thickness, conductivity type, doping elements and doping concentration, resistivity range, minority lifetime, Grain size, carbon and oxygen content, etc. After the observation, put the substrate back into the sample box, put the sample box back to its original place, and close the...

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Abstract

The invention discloses a semiconductor micro-nano processing technology training system based on VR and AR and its application. The semiconductor micro-nano processing technology training system includes a micro-nano processing courseware unit, and a supporting hardware unit and a supporting software unit connected to the micro-nano processing courseware unit through the Internet, and the micro-nano processing courseware unit includes a semiconductor micro-nano processing courseware unit. Safety protection module, raw material module, process principle module, semiconductor equipment module, process design module and process operation module in technology. The present invention utilizes VR / AR technology to realize the teaching, training, simulation operation and evaluation of semiconductor micro-nano processing technology by constructing a virtual scene of semiconductor micro-nano processing technology, and can support multiple people to study online at the same time and share information in real time. It is conducive to expanding the training scale and efficiency of semiconductor process personnel, and has the characteristics of safe operation, strong sense of interaction, immersive experience, low cost, and high efficiency.

Description

technical field [0001] The invention belongs to the technical field of semiconductors, and relates to a semiconductor micro-nano processing technology simulation training system based on virtual reality (VR) and augmented reality (AR) technologies, in particular to teaching, training, assessment and evaluation of semiconductor device process operations. Background technique [0002] Under the background of the rapid development of artificial intelligence and 5G technology, electronic equipment has been integrated into every aspect of people's life. The research and development speed and production scale of semiconductor devices often determine the industrial upgrading speed and output value scale of the electronic information industry. At present, the manufacturing process of semiconductor core devices has reached 5nm, and semiconductor companies such as TSMC and Samsung are developing 3nm process technology. The micro-nano processing technology of semiconductor devices is ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G09B9/00
CPCG09B9/00Y02P90/30
Inventor 曾中明王祥翔胡瑞曾春红张宝顺
Owner SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI
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