Device and method for generating multi-wavelength vacuum ultraviolet and deep ultraviolet coherent light source
A vacuum ultraviolet and coherent light source technology, applied in optics, nonlinear optics, instruments, etc., can solve the problems of limiting the flexibility of polarization control and the absorption of nonlinear crystals limited by the shortest wavelength, achieving short pulse width, narrow bandwidth, and large The effect of flexibility
Active Publication Date: 2020-11-13
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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Problems solved by technology
In recent years, based on KBe 2 BO 3 f 2 The rapid development of nonlinear optical crystals provides a simple and effective solution for realizing high-energy DUV / VUV light sources, but its shortest wavelength is limited by the absorption edge of nonlinear crystals
For this type of nonlinear optical crystal, wavelength tuning can be achieved by adjusting the phase matching angle, but the requirement of phase matching limits the flexibility of polarization control
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[0029] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments, but the protection scope of the present invention should not be limited thereby.
[0030] see figure 1 , figure 1 It is a schematic diagram of a device for generating multi-wavelength vacuum ultraviolet and deep ultraviolet coherent light sources in the present invention. It can be seen from the figure that the present invention realizes the generation device of multi-wavelength vacuum ultraviolet and deep ultraviolet coherent light sources based on the quantum coherence system, including a two-color pump light generation part, a narrowband DUV / VUV coherent radiation generation and detection part, and a polarization control part.
[0031]Two-color pump light generation part: the near-infrared femtosecond laser 1 outputs near-infrared pump laser ligh...
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The invention discloses a device and a method for generating a multi-wavelength vacuum ultraviolet and deep ultraviolet coherent light source. Main elements of the device comprise a near-infrared femtosecond laser, a beam splitter, a delay line, a beam shrinking system, a frequency doubling crystal, a half-wave plate, a quarter-wave plate, a focusing lens, an air cavity, a filter plate and the like. In the device, near-infrared femtosecond laser light is divided into two beams of light through the beam splitter, one beam of light serves as near-infrared pump light, and the other beam of lightis used for generating ultraviolet pump light with tunable wavelength. The near-infrared pump light is subjected to molecular ionization and two-photon resonance excitation in a CO gas cavity, and issubjected to resonance four-wave mixing with the ultraviolet pump light to output narrow-band DUV / VUV coherent radiation. Narrow-band DUV / VUV coherent radiation in any polarization state can be generated by changing the elliptical polarization degree of ultraviolet pump light. According to the invention, narrow-band DUV / VUV coherent radiation with multiple wavelengths, narrow linewidth and flexible and controllable polarization can be realized.
Description
technical field [0001] The invention relates to a short-wavelength coherent light source, in particular to a device and method for generating a multi-wavelength vacuum ultraviolet and deep ultraviolet coherent light source, which is of great significance for nano-lithography, surface analysis and precision measurement. Background technique [0002] Vacuum Ultraviolet (VUV, 100-200nm) and Deep Ultraviolet (DUV, 200-300nm) coherent light sources are important tools for research in high-resolution spectroscopy, surface science, and photochemistry. At present, due to its ultra-high brightness and good coherence, free electron lasers have achieved great success in generating short-wavelength light sources. However, such large scientific devices are bulky and expensive, which limits their wide application (see C. Pellegrini, et al., Rev. Mod. Phys. 88, 015006 (2016)). Therefore, it is very necessary to study the desktop DUV / VUV light source and the corresponding light field contr...
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Login to View More IPC IPC(8): G02F1/35
CPCG02F1/3536G02F1/3501
Inventor 程亚姚金平万悦芯刘招祥许波陈锦明张方波张志豪
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI