Graphene semiconductor radiation detection device and preparation method thereof
A graphene semiconductor and radiation detection technology, which is applied in the manufacture of semiconductor devices, electrical components, and final products, can solve the problems of reducing signal transmission paths, unsatisfactory noise performance, and poor anti-interference performance, so as to improve anti-interference, The signal processing process of the detector is simple and direct, and the effect of strong anti-interference ability
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[0039] The technical solutions in the embodiments of the present invention will be described clearly and in detail below with reference to the drawings in the embodiments of the present invention. The described embodiments are only some of the embodiments of the invention.
[0040] The technical scheme that the present invention solves the problems of the technologies described above is:
[0041] The invention describes a semiconductor radiation detection device that uses the resistance value of a graphene field effect tube as a physical quantity measurement. The key technical points involved in the invention are the structure of the graphene resistance sensitive detector and the sequential preparation method of the corresponding detector structure. Including the preparation of insulating layer, graphene layer and signal electrode layer.
[0042] The detector structure is as figure 2 As shown, an insulating isolation layer (SiO 2 ), prepare a panel array structure graphene...
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