Manufacturing method of array substrate, array substrate and display panel
A technology of an array substrate and a manufacturing method, applied in the field of display equipment, can solve problems such as panel redness, and achieve the effects of improving panel redness, solving panel redness, and ensuring protective performance
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Embodiment 1
[0036] figure 1 The flow chart of the manufacturing method of the array substrate provided by the embodiment of the present invention, such as figure 1 As shown, the manufacturing method of the array substrate provided in this embodiment includes:
[0037] S100 , depositing a gate metal layer on the base substrate, and forming a gate and a scan line through a photolithography process.
[0038] Specifically, the base substrate 10 may be a transparent glass substrate, and a layer of gate metal layer 20 is formed on the base substrate 10 through a film-forming device. The material of the gate metal layer 20 may be metal such as titanium or copper, and then coated, After exposure, development, and etching, gate electrodes 21 and scan lines 22 are formed at corresponding preset positions.
[0039] It should be noted that the array substrate manufacturing method in this embodiment forms a plurality of scanning lines 22, and the plurality of scanning lines 22 are distributed in an ...
Embodiment 2
[0068] Such as Figure 3 to Figure 5 As shown, the present invention provides an array substrate, including a stacked base substrate 10, a thin film transistor, and a protective layer 60. The thin film transistor includes a sequentially stacked gate 21, buffer layer 30, semiconductor pattern 40, source and drain The metal layer, wherein the source-drain metal layer includes the source electrode 50 and the drain electrode 51 , and different regions of the protection layer 60 have different thicknesses.
[0069] As an optional manner, the present invention provides an array substrate, where the protective layer 60 has a first region 601 and / or a second region 602 .
[0070] Wherein, the second region 602 is opposite to the position of the spacer 100, and the projection of the second region 602 extends to the peripheral side of the spacer 100, and the surface of the protective layer 60 in the second region 602 is a flat surface, so that After the spacer 100 is pressed to generat...
Embodiment 3
[0077] This embodiment provides a display panel, including the array substrate in Embodiment 2. The specific structure and functions of the array substrate have been described in detail in Embodiment 2 above, so details will not be repeated here.
[0078] Specifically, the display panel provided in this embodiment includes the array substrate and the color filter substrate in the second embodiment, the spacer is arranged between the array substrate and the color filter substrate, and the display panel also includes a plurality of pixels arranged in an array area, through the half-mask process to form protective layers with different thicknesses in each area, so that the surface of the corresponding protective layer of the spacer located in the non-display area is flattened, while ensuring the product transmittance, it solves the problem of spacer being damaged The problem of being unable to reset after lateral displacement caused by compression can also make the protective laye...
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