A kind of preparation method of crcuc gradient gradient crcu composite carbon film bipolar plate
A composite carbon and bipolar plate technology, which is applied to fuel cell parts, electrochemical generators, vacuum evaporation coating, etc., can solve the problem that PEMFC metal bipolar plates are easily corroded and passivated, and achieve improved hydrophobicity , stable performance, high conductivity effect
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Embodiment 1
[0020] (1) Polish the stainless steel (316L stainless steel) substrate, and ultrasonically clean it with acetone cleaning solution and ethanol cleaning solution for 15 minutes respectively to remove surface impurities and organic pollutants such as oil stains and rust spots, then dry it with nitrogen, and put it into the coating vacuum Chamber preparation for coating;
[0021] (2) Pump the vacuum system to 1.0×10 -3 Pa and below, pass in argon gas; turn on the high bias voltage, control the argon gas pressure 2.0Pa, bias voltage 800 V, etch and clean the target surface and stainless steel sample surface; the time is 15 min;
[0022] (3) The bias voltage was adjusted to 100 V, the argon gas pressure was 1.4-1.5 Pa, the pure CrCu metal transition layer was deposited by magnetron sputtering, the average current was 6.5 A, the voltage was 700 V, the duty cycle was 20%, and the pulse length was 3000 ms; The deposition time is 25 min, and the thickness of the CrCu metal transition ...
Embodiment 2
[0027] (1) Polish the stainless steel (316L stainless steel) substrate, and ultrasonically clean it with acetone cleaning solution and ethanol cleaning solution for 15 minutes respectively to remove surface impurities and organic pollutants such as oil stains and rust spots, then dry it with nitrogen, and put it into the coating vacuum Chamber preparation for coating;
[0028] (2) Pump the vacuum system to 1.0×10 -3 Pa and below, pass in argon gas; turn on the high bias voltage, control the argon gas pressure to 1.5 Pa, and the bias voltage to 900 V, etch and clean the target surface and stainless steel sample surface; the time is 20 minutes;
[0029] (3) The bias voltage was adjusted to 100 V, the argon gas pressure was 1.4-1.5 Pa, the pure CrCu metal transition layer was deposited by magnetron sputtering, the average current was 6.5 A, the voltage was 700 V, the duty cycle was 20%, and the pulse length was 3000 ms; The deposition time is 25 min, and the thickness of the CrC...
Embodiment 3
[0034] (1) Polish the stainless steel (316L stainless steel) substrate, and ultrasonically clean it with acetone cleaning solution and ethanol cleaning solution for 20 minutes respectively to remove surface impurities and organic pollutants such as oil stains and rust spots, then dry it with nitrogen, and put it into the coating vacuum Chamber preparation for coating;
[0035] (2) Pump the vacuum system to 1.0×10 -3 Pa and below, pass in argon gas; turn on the high bias voltage, control the argon gas pressure to 2.0Pa, and the bias voltage to 900 V, etch and clean the target surface and stainless steel sample surface; the time is 15 min;
[0036] (3) The bias voltage was adjusted to 130 V, the argon gas pressure was 1.4-1.5 Pa, the pure CrCu metal transition layer was deposited by magnetron sputtering, the average current was 6.5 A, the voltage was 700 V, the duty cycle was 20%, and the pulse length was 3000 ms; The deposition time is 25 min, and the thickness of the CrCu met...
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Abstract
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