Ultraviolet photodiode and preparation method thereof

A technology of ultraviolet light and diodes, applied in circuits, electrical components, semiconductor devices, etc., can solve the problems of low current on/off ratio, weak and low light absorption, small light response rate, etc., and achieve high responsivity rate and high light response rate, high-efficiency photoelectric conversion effect
CN112164732AActive Publication Date: 2021-01-01WUYI UNIV
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
WUYI UNIV
Publication Date
2021-01-01

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Abstract

The invention belongs to the technical field of semiconductors, and discloses an ultraviolet photodiode and a preparation method thereof. The ultraviolet photodiode comprises the following structures:a substrate; a GaN layer which is arranged on the upper surface of the substrate; a Ti3C2 Schottky contact layer and a ohmic contact layer which are oppositely arranged on the two sides of the uppersurface of the GaN layer; and a metal contact layer which is arranged on the upper surface of the Ti3C2 Schottky contact layer. The ultraviolet photodiode has the advantages of excellent ultraviolet detection performance, high responsivity, high specific detection rate, high response speed and high current switch ratio; and the preparation method does not need a complex metal deposition or sputtering process, does not damage the surface of the semiconductor, and is simple in process.
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Description

technical field

[0001] The invention belongs to the technical field of semiconductors, in particular to an ultraviolet photodiode and a preparation method thereof. Background technique

[0002] Ultraviolet photodetectors (PDs) are fundamental optoelectronic devices capable of converting incident short-wavelength (<400 nm) radiation into electrical signals for photoelectric conversion processing. Based on the capture, recognition and visualization of optical information by detectors, ultraviolet detection technology has a wide range of applications in the fields of military, security communication, imaging, biological detection, chemical analysis and daily life monitoring. Current commercial UV photodiodes are mainly based on vacuum photomultiplier tubes and UV-enhanced silicon photodiodes. However, vacuum devices have disadvantages such as large volume, high operating voltage, and inherent fragility when using vacuum tubes; in addition, the preparation of high-performanc...

Claims

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