MEMS gas sensitive structure based on ink droplet printing and preparation method thereof

Abstract

The invention relates to an MEMS gas sensitive structure based on ink droplet printing and a preparation method thereof. The MEMS gas sensitive structure comprises a substrate, a metal electrode layerand a gas sensitive layer, wherein the gas sensitive layer is a linear structure which is arranged on the substrate and is connected with the end parts of metal electrodes at the overlapping part ofthe metal electrodes, a gas sensitive material is solubilized, and a gas sensitive material film is formed by dispensing the gas sensitive material in a determined step length in the overlapping areaof the positive electrode and the negative electrode through using a precision printing nozzle. According to the MEMS gas sensitive structure and the preparation method thereof, smaller structural line width and better sensitivity can be achieved without depending on the distance between the metal electrodes, and due to the fact that the amount of ink drops, the printing and ink jetting position and the step length of movement of the spray head can be accurately controlled, the gas sensitive layer good in repeatability and high in size precision is manufactured on the basis of the method, andbatch and low-cost preparation of the MEMS gas sensitive structure is facilitated.

Description

technical field [0001] The invention belongs to the technical field of gas detection, and relates to a MEMS gas sensitive structure based on ink drop printing and a preparation method thereof. Background technique [0002] Gas sensor is an important part of MEMS (Microelectro Mechanical Systems: microelectromechanical system) sensing technology field. Gas sensitive structure is a key component to realize the function of gas sensor. Its structure and process design have a decisive impact on the performance of gas sensor. The line width of the MEMS gas-sensitive structure, that is, the minimum plane scale on which the gas-sensitive material can function effectively, such as the minimum distance between a pair of electrodes covered with gas-sensitive materials, has a large and direct impact on its sensitivity, because more A small line width means that the amount of gas-sensitive material carried by the equivalent smallest gas-sensing unit is also reduced, and the relative chan...

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Problems solved by technology

However, only reducing the line width usually cannot directly bring about the improvement of performance. The reason is that, on the one hand, the minimum line width is limited by the MEMS processing technology; When the width is smaller than the conductive impurity particles in the environment, these particles are likely to cause the function failure of the gas sensitive structure, such as Figure 1a , 1b shown

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