Coaxial double-coil radio frequency driving gas discharge device

Abstract

The invention provides a discharge device for generating low-temperature and low-pressure plasmas by adopting a coaxial double-coil radio frequency driving gas discharge mode. According to the invention, two spiral coils and a shielding layer form a double-coil radio frequency resonant cavity to excite gas in a gas conduit to generate plasma discharge. Parameters of the inner solenoid coil and the outer solenoid coil are different, radio frequency signals with different frequencies can be adopted to drive plasma to discharge at the same time, decoupling independent control is carried out on electron energy and electron density, and the metastable state atom excitation efficiency is improved. The plasma discharge device is provided with the inner solenoid coil and the outer solenoid coil, when one solenoid coil fails, the other solenoid coil can work independently to drive plasma to discharge, the reliability and robustness of the discharge device can be improved, and the number of vacuum maintenance times for disassembly and assembly is reduced.

Description

technical field [0001] The invention relates to a coaxial double-coil radio-frequency-driven gas discharge device, which is used to generate low-temperature and low-pressure gas plasma discharge, and generates a metastable atomic beam through electron collision excitation, which can be used for precision spectrum measurement, atomic lithography, atomic Frequency standard and other research and application fields. Background technique [0002] The metastable atomic beam with high intensity and high collimation has important applications in many fields such as atomic lithography, atomic optics, atomic collision, atomic frequency standard, precision spectrum measurement, trace analysis, Bose-Einstein condensate, etc. . Many physical processes and applications can only be achieved with high-intensity beams of atoms. Therefore, how to generate a high-intensity metastable atomic beam has become a very important technical problem. [0003] Usually, direct current or radio freque...

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Problems solved by technology

[0004] The above structure has the following problems: the existing helical resonator radio frequency gas discharge device adopts a single helical coil, the excitation efficiency is low when driven by the fundamental frequency radio frequency signal, and the excitation efficiency is twice that of the fundamental frequency when driven by the triple frequency radio frequency signal , so the triple frequency is usually used to drive the plasma discharge, but the triple frequency work has problems such as difficulty in starting the discharge, rapid decline in the resonance characteristics of the coil, and unstable discharge. run

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