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Infrared optical product composite anti-reflection film and preparation method thereof

A technology of infrared optics and anti-reflection coating, applied in optics, optical components, gaseous chemical plating, etc., can solve problems such as cross contamination, process complexity, and the inability to use large-sized optical materials to coat, and achieve high adhesion , Excellent refractive index, uniform and dense product

Active Publication Date: 2021-05-25
安徽中飞科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, this method will cause complexity in the process of product transfer and cause cross-contamination, and it cannot be used for coating large-scale optical materials

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0045] The preparation method of the infrared optical product composite anti-reflection film of the present invention comprises the following steps:

[0046] (1) The base material is ultrasonically treated in a water bath for 20 min with acetone and alcohol; the base material is zinc selenide;

[0047] (2) Place the substrate processed in step (1) on the sample stage of the ECR-MPCVD equipment, and the vacuum degree is 5×10 -4 Microwave preheating at Pa for 10 minutes, feed 15sccmAr and adjust the microwave power to 300W and the magnetic field coil current to 102A, so that the magnetic field strength of the substrate is 0.0875T, and the cavity pressure is adjusted to 0.3Pa. After the glow is generated, stop the Ar Transport and pass through 10sccmH 2 Perform plasma etching on the substrate for 10 minutes;

[0048] (3) the base material after the step (2) process is passed into process gas with ECR-MPCVD method to carry out GeC / DLC composite film pre-coating film; Described p...

Embodiment 2

[0055] The preparation method of the infrared optical product composite anti-reflection film of the present invention comprises the following steps:

[0056] (1) The base material is ultrasonically treated in a water bath for 20 min with acetone and alcohol; the base material is zinc sulfide;

[0057] (2) Place the substrate processed in step (1) on the sample stage of the ECR-MPCVD equipment, and the vacuum degree is 5×10 -4 Microwave preheating at Pa for 10 minutes, feed 15sccmAr and adjust the microwave power to 300W and the magnetic field coil current to 102A, so that the magnetic field strength of the substrate is 0.0875T, and the cavity pressure is adjusted to 0.3Pa. After the glow is generated, stop the Ar Transport and pass through 10sccmH 2 Perform plasma etching on the substrate for 10 minutes;

[0058] (3) the base material after the step (2) process is passed into process gas with ECR-MPCVD method to carry out GeC / DLC composite film pre-coating film; Described pr...

Embodiment 3

[0065] The preparation method of the infrared optical product composite anti-reflection film of the present invention comprises the following steps:

[0066] (1) The base material is ultrasonically treated in a water bath for 20 min with acetone and alcohol; the base material is zinc selenide;

[0067] (2) Place the substrate processed in step (1) on the sample stage of the ECR-MPCVD equipment, and the vacuum degree is 5×10 -4 Microwave preheating at Pa for 10 minutes, feed 15sccmAr and adjust the microwave power to 300W and the magnetic field coil current to 102A, so that the magnetic field strength of the substrate is 0.0875T, and the cavity pressure is adjusted to 0.3Pa. After the glow is generated, stop the Ar Transport and pass through 10sccmH 2 Perform plasma etching on the substrate for 10 minutes;

[0068] (3) the base material after the step (2) process is passed into process gas with ECR-MPCVD method to carry out GeC / DLC composite film pre-coating film; Described p...

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Abstract

The invention discloses an infrared optical product composite anti-reflection film and a preparation method thereof, and belongs to the technical field of film plating. According to the preparation method of the infrared optical product composite anti-reflection film, alternating deposit plating of DLC films and GeC films is conducted on a zinc selenide or zinc sulfide substrate through an ECR-MPCVD method; and the operation steps are simple and controllable, and the product cannot be subjected to cross contamination. The product is uniform and compact, and the requirement of an infrared optical film for permeability improvement and thickness can be met. The invention further discloses the infrared optical product composite anti-reflection film prepared by using the reparation method of the infrared optical product composite anti-reflection film. The product has an excellent refractive index, the thickness of the product is consistent with the actually required the thickness, and it can be achieved that the permeability of the film with the thickness of 8-12 micrometers is improved.

Description

technical field [0001] The invention relates to the field of coating technology, in particular to a composite anti-reflection coating for infrared optical products and a preparation method thereof. Background technique [0002] The optical imaging detection system includes an infrared window substrate and an infrared anti-reflection coating. Infrared optical materials zinc sulfide and zinc selenide are widely used in the front end of high-end infrared detectors. Improve its transmittance, ability to resist sand erosion and rain erosion. Usually, the preparation methods for zinc sulfide and zinc selenide infrared anti-reflection protective films are mainly physical vapor deposition (PVD) and chemical vapor deposition (CVD), wherein physical vapor deposition mainly includes magnetron sputtering, electron beam evaporation, chemical Vapor deposition is mainly plasma-enhanced chemical vapor deposition, and there is also filtered cathode vacuum arc deposition. [0003] Diamond-l...

Claims

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Application Information

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IPC IPC(8): C23C16/02C23C16/26C23C16/32G02B1/115
CPCC23C16/32C23C16/26C23C16/02G02B1/115
Inventor 李光存于金凤任丽朱刘
Owner 安徽中飞科技有限公司
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