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Device for triggering excimer laser

An excimer laser, gas laser technology, applied in excitation methods/devices, gas laser parts, lasers, etc., can solve the problems of excimer lasers that cannot be used as laser amplifiers and low optical energy, etc.

Active Publication Date: 2021-05-28
HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

But the light energy it emits is low, so it needs to be amplified by excimer laser to realize other functions
[0003] Existing excimer lasers cannot be synchronized with the time when the discharge and the seed light arrive at the excimer laser, so that the existing excimer laser cannot be used as a laser amplifier

Method used

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  • Device for triggering excimer laser
  • Device for triggering excimer laser
  • Device for triggering excimer laser

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0055] A device for triggering an excimer laser, the device comprising the following components:

[0056] A signal acquisition module, used for collecting the trigger signal of the beam laser 9 that sends the seed light to the gas laser 4;

[0057] The electrical signal processing module 2 is used to receive and process the trigger signal of the beam laser 9 collected by the signal acquisition module, and input the processed trigger signal to the enabling terminal of the gas laser 4, so that the time when the seed light reaches the gas laser 4 It is synchronized with the discharge time of the gas laser 4; the discharge time of the gas laser 4 is controlled by the enabling terminal of the gas laser 4.

[0058] The signal acquisition module includes a fiber optic receiver F1 and a first conversion unit 1; the trigger signal of the beam laser 9 is input to the photoresistor of the fiber optic receiver F1 in the form of an optical signal; The input end is electrically connected, ...

Embodiment 2

[0076] In the basic line of embodiment 1, it is introduced respectively below:

[0077] Such as figure 1 and figure 2 As shown, the signal acquisition module includes a fiber optic receiver F1 of model R2526 and a first conversion unit 1 . The first converting unit 1 includes a first field effect transistor Q1, a first resistor R1, a second resistor R2, and a third resistor R3. The output end of the optical fiber receiver F1 is connected to the gate of the first field effect transistor Q1, the drain of the first field effect transistor Q1 is connected to a 5V DC voltage through the second resistor R2, and the source of the first field effect transistor Q1 grounded. The drain of the first field effect transistor Q1 is also used as an output terminal and connected to the input terminal of the electrical signal processing module 2 through the third resistor R3, and the pin 1 of the optical fiber receiver F1 as the output terminal is connected to the first field effect transis...

Embodiment 3

[0083] On the basis of Embodiments 1 and 2, the first conversion unit 1, the optical fiber receiver F1, and the second electrical signal connector 8 in Embodiment 2 are removed, and the following components are added:

[0084] Signal generator 5, is used for outputting the signal that coincides with the trigger signal of beam laser 9;

[0085] The second conversion unit 6 is used to output a potential different from the potential of the output terminal of the signal generator 5;

[0086] The fiber transmitter F2 is used to convert the potential output by the second conversion unit 6 into an optical signal, and the optical signal is transmitted to the beam laser 9 for triggering the beam laser 9 to generate seed light.

[0087] The first output end of the signal generator 5 is connected with the 555 timer F3 in the electrical signal processing module 2 as the input end pin 6 and the pin 2, and the second output end of the signal generator 5 is connected with the second conversi...

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Abstract

The invention relates to the field of excimer lasers, in particular to a device for triggering an excimer laser. The device comprises the following components: a signal collection module is used for acquiring a trigger signal of a light beam laser which sends seed light to a gas laser; an electric signal processing module is used for receiving and processing the trigger signal, collected by the signal collection module, of the light beam laser, and inputting the processed trigger signal to the enabling end of the gas laser, so that the time when the seed light reaches the gas laser is synchronous with the discharge time of the gas laser; and the discharge time of the gas laser is controlled by the enabling end of the gas laser. Therefore, the time that the seed light reaches the excimer laser can be ensured to be synchronous with the discharge of the excimer laser, so that the excimer laser can be used as a laser amplifier.

Description

technical field [0001] The invention relates to the field of excimer lasers, in particular to a device for triggering excimer lasers. Background technique [0002] Excimer lasers are currently the laser devices with the highest output power in the ultraviolet band, and are widely used in industrial, medical, scientific research and other fields. After decades of research and development, excimer laser technology has developed rapidly, especially the rare gas halide excimer laser, due to its high output laser peak power, large pulse energy, and wavelength in the ultraviolet region, it has developed rapidly and has been widely used. The application of excimer lasers is currently the main use. In order to meet some special application requirements, such as semiconductor lithography, high-power processing, ultrafast laser output, etc., excimer laser amplifiers in excimer lasers are required. Excimers are unstable associations that recombine into molecules in the excited state ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01S3/09H01S3/03
CPCH01S3/0903H01S3/03
Inventor 游利兵胡泽雄方晓东陶汝华
Owner HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI
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