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A device for triggering an excimer laser

An excimer laser, gas laser technology, applied in excitation methods/devices, parts of lasers, gas lasers, etc., can solve the problems of excimer lasers that cannot be used as laser amplifiers, low light energy, etc.

Active Publication Date: 2022-07-01
HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

But the light energy it emits is low, so it needs to be amplified by excimer laser to realize other functions
[0003] Existing excimer lasers cannot be synchronized with the time when the discharge and the seed light arrive at the excimer laser, so that the existing excimer laser cannot be used as a laser amplifier

Method used

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  • A device for triggering an excimer laser
  • A device for triggering an excimer laser
  • A device for triggering an excimer laser

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0055] A device for triggering an excimer laser, the device comprising the following components:

[0056] a signal acquisition module, used to collect the trigger signal of the beam laser 9 that sends the seed light to the gas laser 4;

[0057] The electrical signal processing module 2 is used to receive and process the trigger signal of the beam laser 9 collected by the signal acquisition module, and input the processed trigger signal to the enabling end of the gas laser 4, so that the time when the seed light reaches the gas laser 4 It is synchronized with the discharge time of the gas laser 4 ; the discharge time of the gas laser 4 is controlled by the enabling end of the gas laser 4 .

[0058] The signal acquisition module includes a fiber receiver F1 and a first conversion unit 1; the trigger signal of the beam laser 9 is input to the photoresistor of the fiber receiver F1 in the form of an optical signal; the output end of the fiber receiver F1 and the first conversion u...

Embodiment 2

[0076] In the basic row of embodiment 1, it is introduced separately below:

[0077] like figure 1 and figure 2 As shown, the signal acquisition module includes an optical fiber receiver F1 with a model of R2526 and a first conversion unit 1 . The first conversion unit 1 includes a first field effect transistor Q1, a first resistor R1, a second resistor R2, and a third resistor R3. The output end of the optical fiber receiver F1 is connected to the gate of the first field effect transistor Q1, the drain of the first field effect transistor Q1 is connected to the 5V DC voltage through the second resistor R2, and the source of the first field effect transistor Q1 ground. The drain of the first field effect transistor Q1 is also used as an output terminal to be connected to the input terminal of the electrical signal processing module 2 through the third resistor R3, and the pin 1 of the optical fiber receiver F1 as the output terminal is connected to the first field effect t...

Embodiment 3

[0083] On the basis of Embodiments 1 and 2, the first conversion unit 1, the optical fiber receiver F1, and the second electrical signal connector 8 in Embodiment 2 are removed, and the following components are added:

[0084] The signal generator 5 is used for outputting a signal consistent with the trigger signal of the beam laser 9;

[0085] The second conversion unit 6 is used to output a potential different from the potential of the output terminal of the signal generator 5;

[0086] The fiber transmitter F2 is used to convert the potential output by the second conversion unit 6 into an optical signal, and the optical signal is transmitted to the beam laser 9 for triggering the beam laser 9 to generate seed light.

[0087] The first output end of the signal generator 5 is connected with the 555 timer F3 in the electrical signal processing module 2 as the input end pin 6 and pin 2, and the second output end of the signal generator 5 is connected with the second output end ...

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Abstract

The invention relates to the field of excimer lasers, in particular to a device for triggering an excimer laser. The device includes the following components: a signal acquisition module, used to collect the trigger signal of the beam laser that sends the seed light to the gas laser; an electrical signal processing module, used to receive and process the trigger signal of the beam laser collected by the signal acquisition module, and to The processed trigger signal is input to the enabling end of the gas laser, so that the time when the seed light reaches the gas laser is synchronized with the discharge time of the gas laser; the discharge time of the gas laser is controlled by the enabling end of the gas laser. Therefore, the present invention can ensure that the time when the seed light reaches the excimer laser is synchronized with the discharge of the excimer laser, so that the excimer laser can be used as a laser amplifier.

Description

technical field [0001] The invention relates to the field of excimer lasers, in particular to a device for triggering an excimer laser. Background technique [0002] Excimer lasers are currently the laser devices with the highest output power in the ultraviolet band, and are widely used in industry, medical, scientific research and other fields. After decades of research and development, excimer laser technology has developed rapidly, especially the rare gas halide excimer laser, due to its high output laser peak power, high pulse energy, and wavelength in the ultraviolet region, it has developed rapidly and has been widely used. The application of excimer laser is mainly used at present. In order to meet some special application requirements, such as semiconductor lithography, high-power processing, ultrafast laser output, etc., excimer laser amplifiers in excimer lasers are required. Excimers are unstable associates that recombine into molecules in the excited state and ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01S3/09H01S3/03
CPCH01S3/0903H01S3/03
Inventor 游利兵胡泽雄方晓东陶汝华
Owner HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI
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