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Waterproof sound-transmitting membrane assembly and MEMS equipped with waterproof sound-transmitting membrane assembly

A waterproof and sound-permeable membrane, waterproof and sound-permeable technology, applied in MEMS. In the field of steel mesh, it can solve the problems of low elastic deformation of steel mesh, burrs on stainless steel mesh, and high price of steel mesh, and achieve good elastic modulus and mechanical properties, excellent waterproof and sound permeability, and easy installation and processing.

Active Publication Date: 2021-06-08
HANGZHOU IPRO MEMBRANE TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although the support layers formed by the above two different materials have a good supporting effect on the waterproof sound-permeable membrane, in the actual preparation and use process, the research and development personnel found that the above two support layers have certain defects, such as the PI support layer, Because it is non-porous, the sound loss will be large during the sound transmission process, resulting in poor sound transmission performance of the entire waterproof sound-permeable membrane assembly, which in turn affects the normal operation of the corresponding acoustic components, and is not suitable for compact In the instrument; as for the stainless steel mesh support layer, because the stainless steel mesh is prone to burrs in the early processing process, the existence of burrs is not conducive to the overall later processing and installation of the waterproof sound-permeable membrane component, and even if the burrs are too long, it will affect the waterproof and transparent membrane components. The waterproof and sound-permeable performance of the acoustic membrane has adverse effects; at the same time, the elastic deformation of the steel mesh is very low. Once it is subjected to a large force, it is prone to irreversible deformation and cannot return to the original state. The overall sound transmission performance of the component has adverse effects; in addition, the steel mesh is more expensive and the economic cost is higher; the above two support layers have certain shortcomings, and the existence of these shortcomings also limits the waterproof sound-permeable membrane to a certain extent. development of

Method used

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  • Waterproof sound-transmitting membrane assembly and MEMS equipped with waterproof sound-transmitting membrane assembly
  • Waterproof sound-transmitting membrane assembly and MEMS equipped with waterproof sound-transmitting membrane assembly
  • Waterproof sound-transmitting membrane assembly and MEMS equipped with waterproof sound-transmitting membrane assembly

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0064] A waterproof sound-permeable membrane assembly, including a waterproof sound-permeable membrane 1 and a support layer 2, the support layer 2 is located on the side of the waterproof sound-permeable membrane 1 facing away from the external environment;

[0065] The pore diameter of the waterproof sound-permeable membrane 1 is 1 μm, the thickness is 10 μm, and the water pressure resistance is 200 kPa; the sound blocking capacity of the waterproof sound-permeable membrane 1 in the sound frequency range of 100-10000 Hz is 0.7-1.0 dB.

[0066] The support layer 2 is a PI support layer 2; the support layer 2 is provided with several support holes 21, the aperture of the support holes 21 is 0.3mm, and the area ratio of the support holes 21 on the outer surface of the support layer 2 is 35 %; the arrangement of the support holes 21 on the support layer 2 is a rectangular distribution; the air permeability of the support layer 2 is 13.7L / (min·cm 2 )@7kPa, the elastic modulus of ...

Embodiment 2

[0071] The thickness of the support layer 2 in Example 1 is set to 0.06mm, and other conditions remain unchanged; at this time, under the pressure of 500KPa, the relative deformation A of the support layer 2 is 0.76%;

[0072] When subjected to a pressure of 500kPa, the maximum relative deformation E=(2d+AD) / D=(2*0.05+0.76%*3) / 3=4.09% of the waterproof and sound-permeable section 11 is smaller than that of the waterproof and sound-permeable section 11 The relative deformation S of the elastic limit; the scope of the relative deformation S of the elastic limit of the waterproof sound-permeable section 11 in the present invention is 6%;

Embodiment 3

[0074] The thickness of the support layer 2 in Example 1 is set to 0.04mm, and the other conditions remain unchanged; at this time, under the pressure of 500KPa, the relative deformation A of the support layer 2 is 0.98%

[0075] When subjected to a pressure of 500kPa, the maximum relative deformation E=(2d+AD) / D=(2*0.05+0.98%*3) / 3=4.31% of the waterproof and sound-permeable section 11 is smaller than that of the waterproof and sound-permeable section 11 The relative deformation S of the elastic limit; the scope of the relative deformation S of the elastic limit of the waterproof sound-permeable section 11 in the present invention is 6%;

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Abstract

The invention relates to a waterproof sound transmission membrane assembly, which comprises a waterproof sound transmission membrane and a supporting layer, the supporting layer is located on the side, away from the external environment, of the waterproof sound transmission membrane, the supporting layer is a high-molecular polymer layer, the price is low, and overall installation and processing of the waterproof sound transmission membrane assembly are facilitated; meanwhile, the elastic modulus of the supporting layer is 40-400 MPa, and the supporting layer has a large supporting effect on the waterproof sound-transmitting membrane, so that the water pressure resistance of the whole waterproof sound-transmitting membrane assembly is 20-500 kPa, and the water pressure resistance is large; meanwhile, a plurality of supporting holes are formed in the supporting layer, so that the sound transmission performance of the supporting layer is improved, the sound blocking amount of the waterproof sound transmission membrane assembly in the audio frequency range of 100-10000 Hz is smaller than 3 dB, and the sound transmission performance is good; in addition, the waterproof performance of the waterproof sound transmission membrane assembly is IP64 or IP65 or IP66 or IP67 or IP68, and the waterproof performance is high; the waterproof sound transmission membrane assembly is not only suitable for 3C electronic products, but also suitable for electronic products working underwater, and is especially suitable for being applied to MEMS and other micro electro mechanical systems.

Description

technical field [0001] The invention relates to the field of membrane material technology and the field of microelectronics technology, and more specifically relates to a waterproof sound-permeable membrane component and MEMS equipped with the waterproof sound-permeable membrane component. Background technique [0002] With the progress of society, people have higher and higher requirements for mobile phones, notebook computers and other electronic products. It is getting smaller and smaller, which is convenient for people to carry; therefore, the size of the matching electronic parts also needs to be continuously reduced, while the performance and consistency need to be continuously improved. [0003] In the above background, MEMS, an electronic component, has attracted people's attention. MEMS is a micro-electromechanical system, also known as a micro-electromechanical system. It refers to a high-tech device with a size of a few millimeters or even smaller. Its internal st...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H04R7/10H04R19/00H04R19/04H04R31/00B32B27/28B32B27/06B32B33/00B32B7/12B32B3/24
CPCH04R7/10H04R19/005H04R19/04H04R31/003B32B27/281B32B27/08B32B27/06B32B33/00B32B7/12B32B3/266H04R2201/003H04R2307/025H04R2231/001B32B2307/10B32B2307/7265
Inventor 贾建东朱业飞蔡梁黄剑
Owner HANGZHOU IPRO MEMBRANE TECH
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