Rectification device for preparing electronic grade carbon tetrafluoride

Abstract

A rectification device for preparing electronic grade carbon tetrafluoride comprises a tower top condenser, a refining section and a reboiler, one end of the refining section is connected with the tower top condenser, the other end of the refining section is communicated with the reboiler, a horizontal double-tube-pass heat exchanger is arranged in a reboiling chamber of the reboiler, a partition plate is arranged between a heating medium inlet end socket and a heating medium outlet end socket, a flange plate movably connected with the reboiling chamber is arranged on the outer side of the partition plate, and a horizontal double-tube-pass heat exchanger is welded to the partition plate. The refining section comprises a refining section plate, a feeding plate and a section kettle; after a liquid phase in the refining section enters the section kettle from top to bottom, one part of liquid enters a reboiler to be vaporized into rising steam which flows back into the refining section, and the other part of liquid is extracted as a section kettle product; and the tower top condenser is used for condensing an entered vapor phase into liquid, part of the liquid provides reflux liquid for the refining section, and part of condensate is extracted from the top of the refining section.

Description

technical field [0001] The invention relates to a chemical production device, in particular to a rectification device for preparing electronic grade carbon tetrafluoride, which belongs to the technical field of chemical equipment. Background technique [0002] Carbon tetrafluoride (CF4) is currently the most used plasma etching gas in the microelectronics industry. It is widely used in the etching of thin film materials such as silicon, silicon dioxide, silicon nitride, phosphosilicate glass, and tungsten. It is used for cleaning the surface of electronic devices. , the production of solar cells, laser technology, low-temperature refrigeration, gas insulation, leak detection agents, controlling the attitude of space rockets, detergents, lubricants and brake fluids in the production of printed circuits, etc. are also widely used. Due to its strong chemical stability, CF4 can also be used in metal smelting and plastic industries. [0003] In recent years, due to the developme...

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Problems solved by technology

[0005] However, the above-mentioned prior art only gives the component composition of the rectification device, and does not disclose the specific structural configuration, control strategy, and design principle of each functional component, which makes it impossible for those skilled in the art to realize

In addition, the above existing technologies cannot produce high-purity carbon tetrafluoride products that meet the needs of the semiconductor industry. Combined with product technical indicators, the temperature of the rectification tower cannot be stably controlled to achieve efficient distillation and save energy.

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