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Integrated zero-offset adjustable accelerometer servo circuit and manufacturing method and application thereof

A technology of servo circuit and accelerometer, which is applied in the direction of measuring acceleration, speed/acceleration/shock measurement, instruments, etc. It can solve the problems of zero offset, poor sealing of servo circuit and sensor, etc.

Pending Publication Date: 2021-06-22
XIAN MICROELECTRONICS TECH INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] The purpose of the present invention is to overcome the above-mentioned prior art, the servo circuit output has the shortcomings of zero offset, servo circuit and sensor poor sealing, to provide an integrated zero-bias adjustable accelerometer servo circuit and its manufacturing method and application

Method used

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  • Integrated zero-offset adjustable accelerometer servo circuit and manufacturing method and application thereof
  • Integrated zero-offset adjustable accelerometer servo circuit and manufacturing method and application thereof
  • Integrated zero-offset adjustable accelerometer servo circuit and manufacturing method and application thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0036] An integrated zero bias adjustable accelerometer servo circuit, such as figure 1 As shown, the servo circuit is electrically connected to the external sensor head, and the sensor head includes a torque sensor and a differential capacitance sensor; the servo circuit includes a differential capacitance voltage converter, a transconductance compensation amplifier, a feedback network, and a zero-bias compensation module; The input terminal of the dynamic capacitance voltage converter is electrically connected with the output terminal of the differential capacitance sensor, the output terminal of the differential capacitance voltage converter is connected with the input terminal of the transconductance compensation amplifier, and the transconductance compensation amplifier is provided with two signal output terminals, One signal output end is electrically connected to the torquer, the other output end is connected to the input end of the feedback network, and the output end o...

Embodiment 2

[0038] The integrated zero-bias adjustable accelerometer servo circuit system is composed of a sensor head and a servo circuit. The system block diagram is shown in Figure 1. The sensor head is composed of torque converter, pendulum component dynamics, and differential capacitance sensor; the servo circuit is mainly composed of differential capacitance voltage converter, transconductance compensation amplifier, feedback network, and zero offset compensation module. The function of the servo circuit is realized by a linear regulated power supply, a reference triangular wave generator, a differential capacitance detector, an integral network, a transconductance compensation amplifier, a feedback network, and a zero offset compensation module. The differential capacitance voltage converter comprises a reference triangular wave generator, a differential capacitance detector and an integral network connected to each other; the input end of the differential capacitance detector is co...

Embodiment 3

[0040] Except for the following content, all the other contents are the same as in Example 1.

[0041] The linear regulated power supply provides high-precision, low-time drift, and low-temperature drift power supply voltage for the zero offset compensation module. The differential capacitor voltage converter includes a reference triangular wave generator, a differential capacitor detector, and an integral network. The input terminal of the differential capacitor detector is connected to the output terminal of the differential capacitor sensor, and the output terminal of the differential capacitor detector is connected to the integral network. The input terminal of the integration network is connected to the input terminal of the transconductance compensation amplifier. The linear stabilized voltage power supply servo transconductance compensation amplifier includes a linear stabilized voltage power supply and a transconductance compensation amplifier, and the feedback network...

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PUM

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Abstract

The invention discloses an integrated zero-offset adjustable accelerometer servo circuit and a manufacturing method and application thereof, and belongs to the technical field of semiconductor hybrid integration. The sensor head is composed of a torquer, pendulum assembly dynamics and a differential capacitance sensor. The servo circuit system is mainly composed of a differential capacitor voltage converter, a transconductance compensation amplifier, a feedback network, a zero-offset compensation module and the like. Functions of the servo circuit are realized by a linear voltage-stabilized power supply, a reference triangular wave generator, the differential capacitance detector, the integral network, the transconductance compensation amplifier, the feedback network and the zero-offset compensation module, output zero correction of the accelerometer can be realized, zero-offset compensation of output current of the servo circuit is completed at an output stage, zero offset of the accelerometer is effectively reduced, and the output precision of the accelerometer servo circuit is improved. Meanwhile, integrated full-sealed packaging of the servo circuit and the accelerometer sensor head is achieved through laser seam welding, and the sealing reliability of the accelerometer is improved.

Description

technical field [0001] The invention belongs to the technical field of semiconductor hybrid integration, and relates to an integrated zero-bias adjustable accelerometer servo circuit and a manufacturing method and application thereof. Background technique [0002] The accelerometer is a sensor that measures the linear acceleration of the moving carrier. By detecting the parameter changes of its internal sensitive components, the acceleration value of the moving carrier is obtained, and the acceleration signal is processed by necessary integral calculation and coordinate transformation, and then combined with the gyroscope in the system , the complete spatial information of the motion carrier can be obtained. The quartz flexible accelerometer servo circuit is a force balance accelerometer servo circuit. Its function is to detect the variation of the differential capacitance signal and convert it into a current signal. This circuit forms an accelerometer together with a specia...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/125
CPCG01P15/125
Inventor 张明徐鑫万欢欢阮晓明
Owner XIAN MICROELECTRONICS TECH INST
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