Unlock instant, AI-driven research and patent intelligence for your innovation.

Parylene F type vapor deposition method

A vapor deposition, stage technology, applied in metal material coating process, vacuum evaporation coating, coating and other directions, can solve the problems of unstable evaporation rate, difficult synthesis, low deposition efficiency, etc., to reduce the difficulty of film thickness control , the evaporation rate is stable, the effect of improving processing efficiency

Active Publication Date: 2021-06-25
GUIZHOU AEROSPACE LINQUAN MOTOR CO LTD
View PDF17 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Compared with Parylene C type, the performance of Parylene D type is slightly improved, and the deposition efficiency is low and the cost is high, so it is rarely used in the industry at present.
Although Parylene AF4 can withstand a temperature of up to 480°C, it is extremely difficult to synthesize, and the global annual production is still less than 1000kg, so the price is extremely expensive, and considering the usage scenarios, there is a lot of performance waste, and it is generally not used except in very special scenarios. use
This technology realizes the gasification of Parylene F by controlling the temperature. The evaporation pressure is constantly changing, and the evaporation rate is unstable; can still not enough
[0007] Domestic current Parylene gas-phase deposition has fewer relevant technical standards (only SJ 20897 "parylene deposition process specification"), and does not provide clear suggestions on the process parameters of Parylene F type, etc., so the present invention intends to adopt Starting from the deposition principle and process of Parylene F type, improving its process parameters and improving processing efficiency under the premise of ensuring performance

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Parylene F type vapor deposition method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0027] A kind of Parylene F type vapor deposition method, comprises the following steps:

[0028] 1. Gasification and evaporation:

[0029] (1) Set the base pressure before the temperature of 90°C to 0.1torr, and after reaching 90°C, the pressure drops to 0.04torr. At the same time, the temperature starts to rise from 80°C, and the heating rate is adjusted according to the three temperature stages;

[0030] (2) Heating rate adjustment:

[0031] The first temperature stage: when the temperature is 80℃~90℃, the heating rate is 1℃ / 10min, and the pressure is 0.1torr;

[0032] The second temperature stage: when the temperature is 90℃~120℃, the heating rate is 1℃ / 30min, and the pressure is 0.04torr

[0033] The third temperature stage: when the temperature is >120°C, the heating rate is 1°C / 20min, and the pressure gradually decreases.

[0034] 2. Cracking: Cracking is carried out at a temperature of 750°C.

[0035] 3. Deposition polymerization: gaseous active monomers are deposi...

Embodiment 2

[0037] A kind of Parylene F type vapor deposition method, comprises the following steps:

[0038] 1. Gasification and evaporation:

[0039] (1) Set the base pressure before the temperature of 90°C to 0.1torr, and after reaching 90°C, the pressure drops to 0.03torr. At the same time, the temperature starts to rise from 80°C, and the heating rate is adjusted according to the three temperature stages;

[0040] (2) Heating rate adjustment:

[0041] The first temperature stage: when the temperature is 80℃~90℃, the heating rate is 1℃ / 10min, and the pressure is 0.1torr;

[0042] The second temperature stage: when the temperature is 90℃~120℃, the heating rate is 1℃ / 30min, and the pressure is 0.03torr;

[0043] The third temperature stage: when the temperature is >120°C, the heating rate is 1°C / 20min, and the pressure gradually decreases.

[0044] 2. Cracking: Cracking is carried out at a temperature of 745°C.

[0045] 3. Deposition polymerization: gaseous active monomers are depos...

Embodiment 3

[0047] A kind of Parylene F type vapor deposition method, comprises the following steps:

[0048] 1. Gasification and evaporation:

[0049] (1) Set the base pressure before the temperature of 90°C to 0.1torr, and after reaching 90°C, the pressure will drop to 0.05torr, and at the same time start to heat up from 80°C, and adjust the heating rate according to the three temperature stages;

[0050] (2) Heating rate adjustment:

[0051] The first temperature stage: when the temperature is 80℃~90℃, the heating rate is 1℃ / 10min, and the pressure is 0.1torr;

[0052] The second temperature stage: when the temperature is 90℃~120℃, the heating rate is 1℃ / 30min, and the pressure is 0.05torr;

[0053] The third temperature stage: when the temperature is >120°C, the heating rate is 1°C / 20min, and the pressure gradually decreases.

[0054] 2. Cracking: Cracking is carried out at a temperature of 750°C.

[0055] 3. Deposition polymerization: gaseous active monomers are deposited and pol...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
Thicknessaaaaaaaaaa
Login to View More

Abstract

The invention belongs to the technical field of Parylene F type vapor deposition, and particularly relates to a Parylene F type vapor deposition method. Through optimization and improvement of an evaporation process and a cracking process, a Parylene F type raw material which is difficult to deposit can obtain a high evaporation rate, the pure performance of components of a film layer is excellent, domestic common Parylene vapor deposition equipment is not changed, and the processing efficiency is greatly improved on the premise of ensuring the performance of the film layer; and meanwhile, due to the fact that the evaporation rate is stable, the thickness of the final film layer can be controlled by controlling the process time, the film thickness control difficulty is reduced, and the reaction is more controllable.

Description

technical field [0001] The invention belongs to the technical field of Parylene F type gas phase deposition, in particular to a Parylene F type gas phase deposition method. Background technique [0002] The Chinese name of Parylene is p-xylene dimer, which commonly used includes unsubstituted Parylene N type and its four derivatives ), Parylene F type (tetrafluoro-p-xylene dimer) and Parylene AF4 type (octafluoro-p-xylene dimer). The biggest difference between the five raw materials is the temperature resistance grade. Compared with Parylene C type, the performance of Parylene D type is slightly improved, and the deposition efficiency is low and the cost is high, so it is rarely used in the industry at present. Although Parylene AF4 can withstand a temperature of up to 480°C, it is extremely difficult to synthesize, and the global annual production is still less than 1000kg, so the price is extremely expensive, and considering the usage scenarios, there is a lot of perform...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
IPC IPC(8): C23C14/12C23C14/24
CPCC23C14/12C23C14/24
Inventor 刘佳男王燕黄洪文
Owner GUIZHOU AEROSPACE LINQUAN MOTOR CO LTD