Device and method for improving mask electrolytic machining precision through arc-shaped spraying cathode movement

Abstract

The invention discloses a device and method for improving mask electrolytic machining precision through arc-shaped spraying cathode movement. The device comprises an arc-shaped cathode nozzle structure, an anode workpiece, an electrolytic bath, a motor, a guide rail, a movable sliding block, a transmission lead screw and a supporting beam. The anode workpiece is arranged at the bottom of the electrolytic bath, is completely immersed in an electrolyte and forms a conductive loop with a cathode nozzle. The motor drives the transmission lead screw to rotate, and the transmission lead screw drives the sliding block and the supporting beam on the sliding block to do reciprocating translational motion along the guide rail. The arc-shaped cathode nozzle structure is fixed on the supporting beam, and a moving mechanism drives the arc-shaped cathode nozzle structure to change in position. In the mask electrolytic machining process, an arc-shaped moving cathode is adopted to achieve the purpose of improving electric field distribution in the machining process, and the etching uniformity of a microstructure is improved. The electrolyte sprayed on the arc-shaped cathode can discharge electrolytic products in the microstructure in time, mass transfer is enhanced, and the localized corrosion removal capacity is improved. The device is simple and easy to operate, the uniformity and locality of the metal microstructure can be effectively improved, and the mask electrolytic machining precision is improved.

Description

Technical field [0001] The present invention belongs to the field of fine electrolyzing processing, and is related to a mask electrolytic processing apparatus and method, and more particularly to an arc-shaped injection cathode mobile device and method for improving the mask electrolytic processing accuracy. Background technique [0002] With the rapid development of micro-nanotechnology, the application of metal microstructure is also expanding. At present, the common processing methods of metal microstructure include laser microfabrication, ultrasonic fine processing, micrulte processing, electric spark processing, and electrolysis processing. Among them, the electrolysis processing has no loss of workpiece surface after processing, and has no residual stress and high production efficiency. The mask electrolysis is made as a kind of electrolysis technology, which has low production cost, and can have a large amount of molding of metal microstructure, with a wide range of applic...

AI Technical Summary

Problems solved by technology

However, this method does not take into account the size uniformity among micropit array structures

And when processing large-area metal microstructures, it is necessary to continuously move the nozzle to realize the processing of each microstructure, resulting in low processing efficiency of this method

[0008] To sum up, the existing methods for improving the accuracy of mask electrolytic machining have certain limitations, and it is difficult to guarantee the processing quality and machining accuracy requirements when mask electrolytic machining of metal microstructures

Images